JPS51139766A - Pattern inpsection device - Google Patents

Pattern inpsection device

Info

Publication number
JPS51139766A
JPS51139766A JP50063061A JP6306175A JPS51139766A JP S51139766 A JPS51139766 A JP S51139766A JP 50063061 A JP50063061 A JP 50063061A JP 6306175 A JP6306175 A JP 6306175A JP S51139766 A JPS51139766 A JP S51139766A
Authority
JP
Japan
Prior art keywords
inpsection
pattern
high speed
inspection device
circuit arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50063061A
Other languages
English (en)
Japanese (ja)
Other versions
JPS566183B2 (https=
Inventor
Yoshimasa Oshima
Yasuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50063061A priority Critical patent/JPS51139766A/ja
Publication of JPS51139766A publication Critical patent/JPS51139766A/ja
Publication of JPS566183B2 publication Critical patent/JPS566183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50063061A 1975-05-28 1975-05-28 Pattern inpsection device Granted JPS51139766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50063061A JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50063061A JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Publications (2)

Publication Number Publication Date
JPS51139766A true JPS51139766A (en) 1976-12-02
JPS566183B2 JPS566183B2 (https=) 1981-02-09

Family

ID=13218437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50063061A Granted JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Country Status (1)

Country Link
JP (1) JPS51139766A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166839A (en) * 1979-03-19 1980-12-26 Rca Corp System for inspecting fault of regular pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166839A (en) * 1979-03-19 1980-12-26 Rca Corp System for inspecting fault of regular pattern

Also Published As

Publication number Publication date
JPS566183B2 (https=) 1981-02-09

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