JPS51123062A - Process for doping semiconductor bar in zone melting without cruicible - Google Patents

Process for doping semiconductor bar in zone melting without cruicible

Info

Publication number
JPS51123062A
JPS51123062A JP3589576A JP3589576A JPS51123062A JP S51123062 A JPS51123062 A JP S51123062A JP 3589576 A JP3589576 A JP 3589576A JP 3589576 A JP3589576 A JP 3589576A JP S51123062 A JPS51123062 A JP S51123062A
Authority
JP
Japan
Prior art keywords
cruicible
zone melting
doping semiconductor
semiconductor bar
bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3589576A
Other languages
English (en)
Japanese (ja)
Inventor
Miyuurubaueru Arufureeto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS51123062A publication Critical patent/JPS51123062A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
    • C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3589576A 1975-04-04 1976-03-31 Process for doping semiconductor bar in zone melting without cruicible Pending JPS51123062A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752514824 DE2514824A1 (de) 1975-04-04 1975-04-04 Verfahren zum gezielten einbringen von dotierungsstoffen in halbleiterkristallen beim tiegelfreien zonenschmelzen

Publications (1)

Publication Number Publication Date
JPS51123062A true JPS51123062A (en) 1976-10-27

Family

ID=5943121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3589576A Pending JPS51123062A (en) 1975-04-04 1976-03-31 Process for doping semiconductor bar in zone melting without cruicible

Country Status (9)

Country Link
JP (1) JPS51123062A (enrdf_load_stackoverflow)
BE (1) BE840358R (enrdf_load_stackoverflow)
DD (1) DD125474A6 (enrdf_load_stackoverflow)
DE (1) DE2514824A1 (enrdf_load_stackoverflow)
DK (1) DK105876A (enrdf_load_stackoverflow)
GB (1) GB1483883A (enrdf_load_stackoverflow)
IT (1) IT1058513B (enrdf_load_stackoverflow)
LU (1) LU74104A1 (enrdf_load_stackoverflow)
PL (1) PL101699B3 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045569A (enrdf_load_stackoverflow) * 1973-07-27 1975-04-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045569A (enrdf_load_stackoverflow) * 1973-07-27 1975-04-23

Also Published As

Publication number Publication date
LU74104A1 (enrdf_load_stackoverflow) 1976-07-20
DE2514824A1 (de) 1976-10-14
DD125474A6 (enrdf_load_stackoverflow) 1977-04-20
DK105876A (da) 1976-10-05
BE840358R (fr) 1976-08-02
PL101699B3 (pl) 1979-01-31
IT1058513B (it) 1982-05-10
GB1483883A (en) 1977-08-24

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