JPS51120686A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS51120686A
JPS51120686A JP4517175A JP4517175A JPS51120686A JP S51120686 A JPS51120686 A JP S51120686A JP 4517175 A JP4517175 A JP 4517175A JP 4517175 A JP4517175 A JP 4517175A JP S51120686 A JPS51120686 A JP S51120686A
Authority
JP
Japan
Prior art keywords
pressure converter
semiconductor pressure
semiconductor
flexiblefilm
porvided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4517175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS551714B2 (OSRAM
Inventor
Shunji Shiromizu
Tadashi Tsutsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4517175A priority Critical patent/JPS51120686A/ja
Publication of JPS51120686A publication Critical patent/JPS51120686A/ja
Publication of JPS551714B2 publication Critical patent/JPS551714B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP4517175A 1975-04-16 1975-04-16 Semiconductor pressure converter Granted JPS51120686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4517175A JPS51120686A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4517175A JPS51120686A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Publications (2)

Publication Number Publication Date
JPS51120686A true JPS51120686A (en) 1976-10-22
JPS551714B2 JPS551714B2 (OSRAM) 1980-01-16

Family

ID=12711807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4517175A Granted JPS51120686A (en) 1975-04-16 1975-04-16 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS51120686A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427274A (en) * 1987-04-09 1989-01-30 Nippon Denso Co Semiconductor pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427274A (en) * 1987-04-09 1989-01-30 Nippon Denso Co Semiconductor pressure sensor

Also Published As

Publication number Publication date
JPS551714B2 (OSRAM) 1980-01-16

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