JPS51119386A - Vacuum evapotation vessel - Google Patents

Vacuum evapotation vessel

Info

Publication number
JPS51119386A
JPS51119386A JP4411775A JP4411775A JPS51119386A JP S51119386 A JPS51119386 A JP S51119386A JP 4411775 A JP4411775 A JP 4411775A JP 4411775 A JP4411775 A JP 4411775A JP S51119386 A JPS51119386 A JP S51119386A
Authority
JP
Japan
Prior art keywords
vacuum
evapotation
vessel
creeping
directivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4411775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5442676B2 (enrdf_load_stackoverflow
Inventor
Masahiko Nakajima
Shuzo Watanabe
Akira Miyai
Masaji Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP4411775A priority Critical patent/JPS51119386A/ja
Publication of JPS51119386A publication Critical patent/JPS51119386A/ja
Publication of JPS5442676B2 publication Critical patent/JPS5442676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP4411775A 1975-04-11 1975-04-11 Vacuum evapotation vessel Granted JPS51119386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4411775A JPS51119386A (en) 1975-04-11 1975-04-11 Vacuum evapotation vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4411775A JPS51119386A (en) 1975-04-11 1975-04-11 Vacuum evapotation vessel

Publications (2)

Publication Number Publication Date
JPS51119386A true JPS51119386A (en) 1976-10-19
JPS5442676B2 JPS5442676B2 (enrdf_load_stackoverflow) 1979-12-15

Family

ID=12682652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4411775A Granted JPS51119386A (en) 1975-04-11 1975-04-11 Vacuum evapotation vessel

Country Status (1)

Country Link
JP (1) JPS51119386A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438125U (enrdf_load_stackoverflow) * 1977-08-19 1979-03-13
EP0546248A3 (en) * 1991-12-03 1994-12-28 Leybold Ag Evaporator boat for a substrate-coating apparatus
DE19607400A1 (de) * 1996-02-28 1997-09-04 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438125U (enrdf_load_stackoverflow) * 1977-08-19 1979-03-13
EP0546248A3 (en) * 1991-12-03 1994-12-28 Leybold Ag Evaporator boat for a substrate-coating apparatus
DE19607400A1 (de) * 1996-02-28 1997-09-04 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten
US5788769A (en) * 1996-02-28 1998-08-04 Balzers Und Leybold Deutschland Holding Ag Evaporator boat for an apparatus for coating substrates
DE19607400C2 (de) * 1996-02-28 1999-09-09 Leybold Ag Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten

Also Published As

Publication number Publication date
JPS5442676B2 (enrdf_load_stackoverflow) 1979-12-15

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