JPS51119386A - Vacuum evapotation vessel - Google Patents
Vacuum evapotation vesselInfo
- Publication number
- JPS51119386A JPS51119386A JP4411775A JP4411775A JPS51119386A JP S51119386 A JPS51119386 A JP S51119386A JP 4411775 A JP4411775 A JP 4411775A JP 4411775 A JP4411775 A JP 4411775A JP S51119386 A JPS51119386 A JP S51119386A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- evapotation
- vessel
- creeping
- directivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
PURPOSE:A vacuum evaporation vessel eliminating creeping of molten material from the cavity and having a predetermined evaporating directivity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411775A JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411775A JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51119386A true JPS51119386A (en) | 1976-10-19 |
JPS5442676B2 JPS5442676B2 (en) | 1979-12-15 |
Family
ID=12682652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4411775A Granted JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51119386A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5438125U (en) * | 1977-08-19 | 1979-03-13 | ||
EP0546248A2 (en) * | 1991-12-03 | 1993-06-16 | Leybold Aktiengesellschaft | Evaporator boat for a substrate-coating apparatus |
DE19607400A1 (en) * | 1996-02-28 | 1997-09-04 | Leybold Ag | Evaporator boat for a device for coating substrates |
-
1975
- 1975-04-11 JP JP4411775A patent/JPS51119386A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5438125U (en) * | 1977-08-19 | 1979-03-13 | ||
JPS5738365Y2 (en) * | 1977-08-19 | 1982-08-24 | ||
EP0546248A2 (en) * | 1991-12-03 | 1993-06-16 | Leybold Aktiengesellschaft | Evaporator boat for a substrate-coating apparatus |
EP0546248A3 (en) * | 1991-12-03 | 1994-12-28 | Leybold Ag | Evaporator boat for a substrate-coating apparatus |
DE19607400A1 (en) * | 1996-02-28 | 1997-09-04 | Leybold Ag | Evaporator boat for a device for coating substrates |
US5788769A (en) * | 1996-02-28 | 1998-08-04 | Balzers Und Leybold Deutschland Holding Ag | Evaporator boat for an apparatus for coating substrates |
DE19607400C2 (en) * | 1996-02-28 | 1999-09-09 | Leybold Ag | Evaporator boat for a device for coating substrates |
Also Published As
Publication number | Publication date |
---|---|
JPS5442676B2 (en) | 1979-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5273275A (en) | Selfflubricating composion or molded product of the like | |
GB1546433A (en) | Manufacture of containers of sheet material | |
JPS5246384A (en) | Vacuum evaporation apparatus employing electron beam | |
AU5812773A (en) | Process for the manufacture of 4,9(11), 16-3, 20-diketosteroids | |
GB1547964A (en) | Electron beam deflection arrangements | |
JPS51119386A (en) | Vacuum evapotation vessel | |
FR2343260A1 (en) | APPARATUS FOR THE CONTROL OF ELECTRON BEAMS, ESPECIALLY ELECTRON ACCELERATORS | |
CA1001658A (en) | Process for the making of aromatic hydroxylamines | |
CA1005197A (en) | Process for the manufacture of copolymers | |
JPS51151684A (en) | Evaporating source for vacuum evaporation | |
CA999621A (en) | Reed switches and process for making them | |
CA1000739A (en) | Process for the manufacture of low molecular reactive surface-active agents from carbamides | |
JPS51123593A (en) | Deenergizer for film insulation material | |
CA1017361A (en) | Process for the production of 2,2-(4,4'-dihydroxydiphenyl)propane | |
CA881776A (en) | Electron beam evaporated quartz insulating material | |
JPS5219184A (en) | Vapor source | |
JPS51113488A (en) | Piezo-oscillating electron | |
JPS51122800A (en) | Material of high permeability | |
JPS526378A (en) | Vessel for powder target | |
JPS526379A (en) | Vessel for powder target | |
JPS5211155A (en) | Method of manufacture of tubal material | |
JPS524818A (en) | Speaker | |
JPS52149274A (en) | Process for forming vacuum evaporation film | |
JPS51128738A (en) | Heater for evaporation | |
JPS51149598A (en) | Piezoelectric body material |