JPS51116671A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS51116671A
JPS51116671A JP50041282A JP4128275A JPS51116671A JP S51116671 A JPS51116671 A JP S51116671A JP 50041282 A JP50041282 A JP 50041282A JP 4128275 A JP4128275 A JP 4128275A JP S51116671 A JPS51116671 A JP S51116671A
Authority
JP
Japan
Prior art keywords
electron microscope
type electron
scanning type
enlarging
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50041282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530662B2 (OSRAM
Inventor
Shigeto Sunakozawa
Shinjiro Katagiri
Moriki Kubozoe
Takatoshi Fukuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50041282A priority Critical patent/JPS51116671A/ja
Publication of JPS51116671A publication Critical patent/JPS51116671A/ja
Publication of JPS5530662B2 publication Critical patent/JPS5530662B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP50041282A 1975-04-07 1975-04-07 Scanning type electron microscope Granted JPS51116671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50041282A JPS51116671A (en) 1975-04-07 1975-04-07 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50041282A JPS51116671A (en) 1975-04-07 1975-04-07 Scanning type electron microscope

Publications (2)

Publication Number Publication Date
JPS51116671A true JPS51116671A (en) 1976-10-14
JPS5530662B2 JPS5530662B2 (OSRAM) 1980-08-12

Family

ID=12604080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50041282A Granted JPS51116671A (en) 1975-04-07 1975-04-07 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS51116671A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419657U (OSRAM) * 1977-07-11 1979-02-08
JPS5419658U (OSRAM) * 1977-07-11 1979-02-08
JPS54163989U (OSRAM) * 1978-05-09 1979-11-16
JPS5589256U (OSRAM) * 1978-12-15 1980-06-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419657U (OSRAM) * 1977-07-11 1979-02-08
JPS5419658U (OSRAM) * 1977-07-11 1979-02-08
JPS54163989U (OSRAM) * 1978-05-09 1979-11-16
JPS5589256U (OSRAM) * 1978-12-15 1980-06-20

Also Published As

Publication number Publication date
JPS5530662B2 (OSRAM) 1980-08-12

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