JPS51112171A - Contamination protection equipment for scanning type electron microsco pe - Google Patents

Contamination protection equipment for scanning type electron microsco pe

Info

Publication number
JPS51112171A
JPS51112171A JP50035473A JP3547375A JPS51112171A JP S51112171 A JPS51112171 A JP S51112171A JP 50035473 A JP50035473 A JP 50035473A JP 3547375 A JP3547375 A JP 3547375A JP S51112171 A JPS51112171 A JP S51112171A
Authority
JP
Japan
Prior art keywords
protection equipment
type electron
scanning type
contamination protection
electron microsco
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50035473A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5344785B2 (OSRAM
Inventor
Naotake Saito
Tadao Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50035473A priority Critical patent/JPS51112171A/ja
Publication of JPS51112171A publication Critical patent/JPS51112171A/ja
Publication of JPS5344785B2 publication Critical patent/JPS5344785B2/ja
Granted legal-status Critical Current

Links

JP50035473A 1975-03-26 1975-03-26 Contamination protection equipment for scanning type electron microsco pe Granted JPS51112171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50035473A JPS51112171A (en) 1975-03-26 1975-03-26 Contamination protection equipment for scanning type electron microsco pe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50035473A JPS51112171A (en) 1975-03-26 1975-03-26 Contamination protection equipment for scanning type electron microsco pe

Publications (2)

Publication Number Publication Date
JPS51112171A true JPS51112171A (en) 1976-10-04
JPS5344785B2 JPS5344785B2 (OSRAM) 1978-12-01

Family

ID=12442736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035473A Granted JPS51112171A (en) 1975-03-26 1975-03-26 Contamination protection equipment for scanning type electron microsco pe

Country Status (1)

Country Link
JP (1) JPS51112171A (OSRAM)

Also Published As

Publication number Publication date
JPS5344785B2 (OSRAM) 1978-12-01

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