JPS51110964A - - Google Patents

Info

Publication number
JPS51110964A
JPS51110964A JP50035520A JP3552075A JPS51110964A JP S51110964 A JPS51110964 A JP S51110964A JP 50035520 A JP50035520 A JP 50035520A JP 3552075 A JP3552075 A JP 3552075A JP S51110964 A JPS51110964 A JP S51110964A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50035520A
Other languages
Japanese (ja)
Other versions
JPS5344786B2 (enrdf_load_stackoverflow
Inventor
Fumio Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3552075A priority Critical patent/JPS5344786B2/ja
Publication of JPS51110964A publication Critical patent/JPS51110964A/ja
Publication of JPS5344786B2 publication Critical patent/JPS5344786B2/ja
Expired legal-status Critical Current

Links

JP3552075A 1975-03-26 1975-03-26 Expired JPS5344786B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3552075A JPS5344786B2 (enrdf_load_stackoverflow) 1975-03-26 1975-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3552075A JPS5344786B2 (enrdf_load_stackoverflow) 1975-03-26 1975-03-26

Publications (2)

Publication Number Publication Date
JPS51110964A true JPS51110964A (enrdf_load_stackoverflow) 1976-09-30
JPS5344786B2 JPS5344786B2 (enrdf_load_stackoverflow) 1978-12-01

Family

ID=12444015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3552075A Expired JPS5344786B2 (enrdf_load_stackoverflow) 1975-03-26 1975-03-26

Country Status (1)

Country Link
JP (1) JPS5344786B2 (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108735A (en) * 1979-02-13 1980-08-21 Fujitsu Ltd Method for maintenance of electron beam exposure device
JPS57199945U (enrdf_load_stackoverflow) * 1981-06-15 1982-12-18
JPH0233844A (ja) * 1988-07-22 1990-02-05 Hitachi Ltd 電子顕微鏡
JP2007305499A (ja) * 2006-05-15 2007-11-22 Hitachi High-Technologies Corp 差動排気走査形電子顕微鏡
JP2009037966A (ja) * 2007-08-03 2009-02-19 Hitachi High-Technologies Corp 走査電子顕微鏡
EP2329252A4 (en) * 2008-09-28 2012-04-11 Nano Ltd B VACUUM DEVICE AND ELECTRONIC SCAN MICROSCOPE
US9431213B2 (en) 2008-07-03 2016-08-30 B-Nano Ltd. Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
US9466458B2 (en) 2013-02-20 2016-10-11 B-Nano Ltd. Scanning electron microscope

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108735A (en) * 1979-02-13 1980-08-21 Fujitsu Ltd Method for maintenance of electron beam exposure device
JPS57199945U (enrdf_load_stackoverflow) * 1981-06-15 1982-12-18
JPH0233844A (ja) * 1988-07-22 1990-02-05 Hitachi Ltd 電子顕微鏡
JP2007305499A (ja) * 2006-05-15 2007-11-22 Hitachi High-Technologies Corp 差動排気走査形電子顕微鏡
JP2009037966A (ja) * 2007-08-03 2009-02-19 Hitachi High-Technologies Corp 走査電子顕微鏡
US9431213B2 (en) 2008-07-03 2016-08-30 B-Nano Ltd. Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
EP2329252A4 (en) * 2008-09-28 2012-04-11 Nano Ltd B VACUUM DEVICE AND ELECTRONIC SCAN MICROSCOPE
US9466458B2 (en) 2013-02-20 2016-10-11 B-Nano Ltd. Scanning electron microscope

Also Published As

Publication number Publication date
JPS5344786B2 (enrdf_load_stackoverflow) 1978-12-01

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