JPS5099357A - - Google Patents

Info

Publication number
JPS5099357A
JPS5099357A JP49001415A JP141574A JPS5099357A JP S5099357 A JPS5099357 A JP S5099357A JP 49001415 A JP49001415 A JP 49001415A JP 141574 A JP141574 A JP 141574A JP S5099357 A JPS5099357 A JP S5099357A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49001415A
Other languages
Japanese (ja)
Other versions
JPS578402B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP741415A priority Critical patent/JPS578402B2/ja
Publication of JPS5099357A publication Critical patent/JPS5099357A/ja
Publication of JPS578402B2 publication Critical patent/JPS578402B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP741415A 1973-12-28 1973-12-28 Expired JPS578402B2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP741415A JPS578402B2 (enrdf_load_html_response) 1973-12-28 1973-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP741415A JPS578402B2 (enrdf_load_html_response) 1973-12-28 1973-12-28

Publications (2)

Publication Number Publication Date
JPS5099357A true JPS5099357A (enrdf_load_html_response) 1975-08-07
JPS578402B2 JPS578402B2 (enrdf_load_html_response) 1982-02-16

Family

ID=11500836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP741415A Expired JPS578402B2 (enrdf_load_html_response) 1973-12-28 1973-12-28

Country Status (1)

Country Link
JP (1) JPS578402B2 (enrdf_load_html_response)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333649A (en) * 1976-09-09 1978-03-29 Handotai Kenkyu Shinkokai Method of and apparatus for detecting distance
JPS6167513U (enrdf_load_html_response) * 1984-10-09 1986-05-09
JPS63108202A (ja) * 1986-10-27 1988-05-13 Nippon Telegr & Teleph Corp <Ntt> 微少隙間の測定方法及びその測定装置
JPS63128218A (ja) * 1986-11-18 1988-05-31 Toyobo Co Ltd 距離測定方法
JPH09101460A (ja) * 1995-10-06 1997-04-15 Yoshinori Hiraiwa 共焦点走査光学顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333649A (en) * 1976-09-09 1978-03-29 Handotai Kenkyu Shinkokai Method of and apparatus for detecting distance
JPS6167513U (enrdf_load_html_response) * 1984-10-09 1986-05-09
JPS63108202A (ja) * 1986-10-27 1988-05-13 Nippon Telegr & Teleph Corp <Ntt> 微少隙間の測定方法及びその測定装置
JPS63128218A (ja) * 1986-11-18 1988-05-31 Toyobo Co Ltd 距離測定方法
JPH09101460A (ja) * 1995-10-06 1997-04-15 Yoshinori Hiraiwa 共焦点走査光学顕微鏡

Also Published As

Publication number Publication date
JPS578402B2 (enrdf_load_html_response) 1982-02-16

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