JPS5333649A - Method of and apparatus for detecting distance - Google Patents

Method of and apparatus for detecting distance

Info

Publication number
JPS5333649A
JPS5333649A JP10854376A JP10854376A JPS5333649A JP S5333649 A JPS5333649 A JP S5333649A JP 10854376 A JP10854376 A JP 10854376A JP 10854376 A JP10854376 A JP 10854376A JP S5333649 A JPS5333649 A JP S5333649A
Authority
JP
Japan
Prior art keywords
detecting distance
detecting
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10854376A
Other languages
Japanese (ja)
Inventor
Jiyunichi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10854376A priority Critical patent/JPS5333649A/en
Publication of JPS5333649A publication Critical patent/JPS5333649A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10854376A 1976-09-09 1976-09-09 Method of and apparatus for detecting distance Pending JPS5333649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10854376A JPS5333649A (en) 1976-09-09 1976-09-09 Method of and apparatus for detecting distance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10854376A JPS5333649A (en) 1976-09-09 1976-09-09 Method of and apparatus for detecting distance

Publications (1)

Publication Number Publication Date
JPS5333649A true JPS5333649A (en) 1978-03-29

Family

ID=14487478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10854376A Pending JPS5333649A (en) 1976-09-09 1976-09-09 Method of and apparatus for detecting distance

Country Status (1)

Country Link
JP (1) JPS5333649A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211301A (en) * 1984-04-06 1985-10-23 Matsushita Electric Ind Co Ltd Measuring method of interference

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099357A (en) * 1973-12-28 1975-08-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099357A (en) * 1973-12-28 1975-08-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211301A (en) * 1984-04-06 1985-10-23 Matsushita Electric Ind Co Ltd Measuring method of interference

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