JPS5084171A - - Google Patents

Info

Publication number
JPS5084171A
JPS5084171A JP49121287A JP12128774A JPS5084171A JP S5084171 A JPS5084171 A JP S5084171A JP 49121287 A JP49121287 A JP 49121287A JP 12128774 A JP12128774 A JP 12128774A JP S5084171 A JPS5084171 A JP S5084171A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49121287A
Other languages
Japanese (ja)
Other versions
JPS5337803B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5084171A publication Critical patent/JPS5084171A/ja
Publication of JPS5337803B2 publication Critical patent/JPS5337803B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Engine Equipment That Uses Special Cycles (AREA)
JP12128774A 1973-11-22 1974-10-21 Expired JPS5337803B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2358300A DE2358300C3 (en) 1973-11-22 1973-11-22 Device for holding a semiconductor crystal rod vertically during crucible-free zone melting

Publications (2)

Publication Number Publication Date
JPS5084171A true JPS5084171A (en) 1975-07-07
JPS5337803B2 JPS5337803B2 (en) 1978-10-12

Family

ID=5898815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12128774A Expired JPS5337803B2 (en) 1973-11-22 1974-10-21

Country Status (7)

Country Link
US (2) US3923468A (en)
JP (1) JPS5337803B2 (en)
BE (1) BE816506A (en)
CA (1) CA1053545A (en)
DE (1) DE2358300C3 (en)
IT (1) IT1025571B (en)
PL (1) PL95739B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4045278A (en) * 1973-11-22 1977-08-30 Siemens Aktiengesellschaft Method and apparatus for floating melt zone of semiconductor crystal rods
DE2455173C3 (en) * 1974-11-21 1979-01-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for vertical holding of the rod end containing the seed crystal during crucible-free zone melting
DE2529366A1 (en) * 1975-07-01 1977-01-20 Wacker Chemitronic DEVICE FOR SUPPORTING A CRYSTALLINE ROD
DE2652199C3 (en) * 1976-11-16 1982-05-19 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Device for supporting the crystal rod during crucible-free zone pulling
JP3376877B2 (en) * 1997-09-02 2003-02-10 信越半導体株式会社 Seed crystal holder
DE112017004008B4 (en) 2016-08-10 2021-08-26 Sumco Corporation Single crystal manufacturing method and apparatus
CN112429282B (en) * 2020-11-10 2022-04-12 常州嘉业智能装备科技有限公司 Funnel for multiple filling

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2989378A (en) * 1956-10-16 1961-06-20 Int Standard Electric Corp Producing silicon of high purity
GB848382A (en) * 1957-11-28 1960-09-14 Siemens Ag Improvements in or relating to the production of mono-crystalline bodies
NL235481A (en) * 1958-02-19
BE581195A (en) * 1958-07-30
US3134700A (en) * 1959-04-22 1964-05-26 Siemens Ag Dislocation removal by a last pass starting at a location displaced from the original seed into the grown crystal
US3179593A (en) * 1960-09-28 1965-04-20 Siemens Ag Method for producing monocrystalline semiconductor material
NL260045A (en) * 1961-01-13
US3159408A (en) * 1961-10-05 1964-12-01 Grace W R & Co Chuck
BE626374A (en) * 1961-12-22
DE1519901A1 (en) * 1966-09-23 1970-02-12 Siemens Ag Method for crucible-free zone melting of a crystalline rod
DE1619993A1 (en) * 1967-03-03 1971-07-01 Siemens Ag Process for growing a rod-shaped single crystal from semiconductor material by crucible-free zone melting
US3494742A (en) * 1968-12-23 1970-02-10 Western Electric Co Apparatus for float zone melting fusible material
DE2059360A1 (en) * 1970-12-02 1972-06-08 Siemens Ag Process for the production of homogeneous bars from semiconductor material

Also Published As

Publication number Publication date
BE816506A (en) 1974-10-16
USRE30863E (en) 1982-02-09
IT1025571B (en) 1978-08-30
DE2358300C3 (en) 1978-07-20
DE2358300B2 (en) 1977-12-01
PL95739B1 (en) 1977-11-30
US3923468A (en) 1975-12-02
CA1053545A (en) 1979-05-01
DE2358300A1 (en) 1975-06-05
JPS5337803B2 (en) 1978-10-12

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