JPS50747A - - Google Patents
Info
- Publication number
- JPS50747A JPS50747A JP4854573A JP4854573A JPS50747A JP S50747 A JPS50747 A JP S50747A JP 4854573 A JP4854573 A JP 4854573A JP 4854573 A JP4854573 A JP 4854573A JP S50747 A JPS50747 A JP S50747A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854573A JPS50747A (ja) | 1973-05-02 | 1973-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854573A JPS50747A (ja) | 1973-05-02 | 1973-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50747A true JPS50747A (ja) | 1975-01-07 |
Family
ID=12806328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4854573A Pending JPS50747A (ja) | 1973-05-02 | 1973-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50747A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128235A (ja) * | 1974-09-03 | 1976-03-10 | Kokusai Electric Co Ltd | Nisankashirikonseiseimakuyokanetsuban |
| JPS5987037A (ja) * | 1982-10-06 | 1984-05-19 | ゼネラル・インスツルメント・コ−ポレ−シヨン | 輻射吸収型ヒ−タ−システムで行なわれる化学蒸着過程に用いられる感受素子 |
| JPS627846A (ja) * | 1985-07-04 | 1987-01-14 | Toshiba Corp | サセプタ |
| JPS631327U (ja) * | 1986-06-23 | 1988-01-07 | ||
| US4807216A (en) * | 1985-09-19 | 1989-02-21 | Matsushita Electric Industrial Co., Ltd. | Recording disc playback apparatus |
| US5119541A (en) * | 1987-01-28 | 1992-06-09 | Tadahiro Ohmi | Wafer succeptor apparatus |
-
1973
- 1973-05-02 JP JP4854573A patent/JPS50747A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128235A (ja) * | 1974-09-03 | 1976-03-10 | Kokusai Electric Co Ltd | Nisankashirikonseiseimakuyokanetsuban |
| JPS5987037A (ja) * | 1982-10-06 | 1984-05-19 | ゼネラル・インスツルメント・コ−ポレ−シヨン | 輻射吸収型ヒ−タ−システムで行なわれる化学蒸着過程に用いられる感受素子 |
| JPH0254430B2 (ja) * | 1982-10-06 | 1990-11-21 | Gen Instrument Corp | |
| JPS627846A (ja) * | 1985-07-04 | 1987-01-14 | Toshiba Corp | サセプタ |
| JPH0372151B2 (ja) * | 1985-07-04 | 1991-11-15 | Tokyo Shibaura Electric Co | |
| US4807216A (en) * | 1985-09-19 | 1989-02-21 | Matsushita Electric Industrial Co., Ltd. | Recording disc playback apparatus |
| JPS631327U (ja) * | 1986-06-23 | 1988-01-07 | ||
| US5119541A (en) * | 1987-01-28 | 1992-06-09 | Tadahiro Ohmi | Wafer succeptor apparatus |
| WO1993013548A1 (en) * | 1987-01-28 | 1993-07-08 | Tadahiro Ohmi | Wafer susceptor |