JPS5071273A - - Google Patents
Info
- Publication number
- JPS5071273A JPS5071273A JP49075488A JP7548874A JPS5071273A JP S5071273 A JPS5071273 A JP S5071273A JP 49075488 A JP49075488 A JP 49075488A JP 7548874 A JP7548874 A JP 7548874A JP S5071273 A JPS5071273 A JP S5071273A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7309451A NL7309451A (nl) | 1973-07-06 | 1973-07-06 | Werkwijze voor het vervaardigen van een inrichting. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5071273A true JPS5071273A (fr) | 1975-06-13 |
Family
ID=19819217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49075488A Pending JPS5071273A (fr) | 1973-07-06 | 1974-07-03 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5071273A (fr) |
| CA (1) | CA1032397A (fr) |
| DE (1) | DE2431311C3 (fr) |
| FR (1) | FR2236336B1 (fr) |
| GB (1) | GB1453253A (fr) |
| IT (1) | IT1037067B (fr) |
| NL (1) | NL7309451A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4165395A (en) * | 1977-06-30 | 1979-08-21 | International Business Machines Corporation | Process for forming a high aspect ratio structure by successive exposures with electron beam and actinic radiation |
| GB8825826D0 (en) * | 1988-11-04 | 1988-12-07 | Gen Electric Co Plc | Deposition processes |
| US4985116A (en) * | 1990-02-23 | 1991-01-15 | Mint-Pac Technologies, Inc. | Three dimensional plating or etching process and masks therefor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3518084A (en) * | 1967-01-09 | 1970-06-30 | Ibm | Method for etching an opening in an insulating layer without forming pinholes therein |
-
1973
- 1973-07-06 NL NL7309451A patent/NL7309451A/xx unknown
-
1974
- 1974-06-29 DE DE19742431311 patent/DE2431311C3/de not_active Expired
- 1974-07-03 JP JP49075488A patent/JPS5071273A/ja active Pending
- 1974-07-03 IT IT2476774A patent/IT1037067B/it active
- 1974-07-03 GB GB2948174A patent/GB1453253A/en not_active Expired
- 1974-07-08 FR FR7423638A patent/FR2236336B1/fr not_active Expired
- 1974-07-30 CA CA205,919A patent/CA1032397A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2431311B2 (de) | 1980-08-21 |
| GB1453253A (en) | 1976-10-20 |
| NL7309451A (nl) | 1975-01-08 |
| FR2236336B1 (fr) | 1977-10-07 |
| CA1032397A (fr) | 1978-06-06 |
| DE2431311A1 (de) | 1975-01-30 |
| FR2236336A1 (fr) | 1975-01-31 |
| IT1037067B (it) | 1979-11-10 |
| DE2431311C3 (de) | 1981-07-02 |