JPS5066186A - - Google Patents

Info

Publication number
JPS5066186A
JPS5066186A JP11391673A JP11391673A JPS5066186A JP S5066186 A JPS5066186 A JP S5066186A JP 11391673 A JP11391673 A JP 11391673A JP 11391673 A JP11391673 A JP 11391673A JP S5066186 A JPS5066186 A JP S5066186A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11391673A
Other versions
JPS5653861B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11391673A priority Critical patent/JPS5653861B2/ja
Publication of JPS5066186A publication Critical patent/JPS5066186A/ja
Publication of JPS5653861B2 publication Critical patent/JPS5653861B2/ja
Expired legal-status Critical Current

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Landscapes

  • Element Separation (AREA)
JP11391673A 1973-10-12 1973-10-12 Expired JPS5653861B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11391673A JPS5653861B2 (ja) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11391673A JPS5653861B2 (ja) 1973-10-12 1973-10-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP13987380A Division JPS5678168A (en) 1980-10-08 1980-10-08 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5066186A true JPS5066186A (ja) 1975-06-04
JPS5653861B2 JPS5653861B2 (ja) 1981-12-22

Family

ID=14624391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11391673A Expired JPS5653861B2 (ja) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5653861B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370685A (en) * 1976-12-06 1978-06-23 Toshiba Corp Production of semiconductor device
JPS58153350A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370685A (en) * 1976-12-06 1978-06-23 Toshiba Corp Production of semiconductor device
JPS58153350A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5653861B2 (ja) 1981-12-22

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