JPS5066186A - - Google Patents
Info
- Publication number
- JPS5066186A JPS5066186A JP11391673A JP11391673A JPS5066186A JP S5066186 A JPS5066186 A JP S5066186A JP 11391673 A JP11391673 A JP 11391673A JP 11391673 A JP11391673 A JP 11391673A JP S5066186 A JPS5066186 A JP S5066186A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11391673A JPS5653861B2 (ja) | 1973-10-12 | 1973-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11391673A JPS5653861B2 (ja) | 1973-10-12 | 1973-10-12 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13987380A Division JPS5678168A (en) | 1980-10-08 | 1980-10-08 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5066186A true JPS5066186A (ja) | 1975-06-04 |
| JPS5653861B2 JPS5653861B2 (ja) | 1981-12-22 |
Family
ID=14624391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11391673A Expired JPS5653861B2 (ja) | 1973-10-12 | 1973-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5653861B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370685A (en) * | 1976-12-06 | 1978-06-23 | Toshiba Corp | Production of semiconductor device |
| JPS58153350A (ja) * | 1982-03-08 | 1983-09-12 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1973
- 1973-10-12 JP JP11391673A patent/JPS5653861B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370685A (en) * | 1976-12-06 | 1978-06-23 | Toshiba Corp | Production of semiconductor device |
| JPS58153350A (ja) * | 1982-03-08 | 1983-09-12 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5653861B2 (ja) | 1981-12-22 |