JPS5065479A - - Google Patents

Info

Publication number
JPS5065479A
JPS5065479A JP49114293A JP11429374A JPS5065479A JP S5065479 A JPS5065479 A JP S5065479A JP 49114293 A JP49114293 A JP 49114293A JP 11429374 A JP11429374 A JP 11429374A JP S5065479 A JPS5065479 A JP S5065479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49114293A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5065479A publication Critical patent/JPS5065479A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1012—Apparatus with means for measuring, testing, or sensing with a window or port for visual observation or examination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP49114293A 1973-10-03 1974-10-03 Pending JPS5065479A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732349736 DE2349736A1 (de) 1973-10-03 1973-10-03 Ueberwachungseinrichtung fuer eine vorrichtung zum ziehen von kristallen aus der schmelze

Publications (1)

Publication Number Publication Date
JPS5065479A true JPS5065479A (ja) 1975-06-03

Family

ID=5894451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49114293A Pending JPS5065479A (ja) 1973-10-03 1974-10-03

Country Status (6)

Country Link
US (1) US4014656A (ja)
JP (1) JPS5065479A (ja)
BE (1) BE820436A (ja)
DE (1) DE2349736A1 (ja)
FR (1) FR2246306A1 (ja)
IT (1) IT1022520B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168590A (ja) * 1985-01-19 1986-07-30 Sumitomo Electric Ind Ltd 揮発性化合物半導体単結晶の製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4242589A (en) * 1979-01-15 1980-12-30 Mobil Tyco Solar Energy Corporation Apparatus for monitoring crystal growth
US4561776A (en) * 1981-03-25 1985-12-31 Diffracto Ltd. Electro-optical sensors for tool and robotic inspection
DE139157T1 (de) * 1983-08-31 1985-11-07 Research Development Corp. Of Japan, Tokio/Tokyo Vorrichtung zur zuechtung von einkristallinen zersetzbaren verbindungen.
US4971650A (en) * 1989-09-22 1990-11-20 Westinghouse Electric Corp. Method of inhibiting dislocation generation in silicon dendritic webs
JPH0774117B2 (ja) * 1989-10-20 1995-08-09 信越半導体株式会社 ヒータの温度パターン作成方法及びこの温度パターンを用いたＳｉ単結晶育成制御装置
KR101554394B1 (ko) * 2013-12-19 2015-09-18 주식회사 엘지실트론 잉곳의 성장공정을 관찰하기 위한 뷰 포트 및 이를 포함하는 잉곳성장장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912321A (en) * 1956-09-04 1959-11-10 Helen E Brennan Continuous casting and refining of material
GB823164A (en) * 1956-11-27 1959-11-04 John Reginald Platt Improvements in or relating to optical pyrometers
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3051035A (en) * 1960-05-17 1962-08-28 American Optical Corp Flexible pyroscopes
US3291650A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Control of crystal size
FR1522416A (fr) * 1967-03-14 1968-04-26 Comp Generale Electricite Perfectionnements au procédé d'obtention de cristaux par tirage
US3692499A (en) * 1970-08-31 1972-09-19 Texas Instruments Inc Crystal pulling system
US3718757A (en) * 1970-12-29 1973-02-27 Ibm Temperature monitoring
CA943368A (en) * 1971-02-05 1974-03-12 Stanislaw M. Veltze Device for measuring temperature of molten metal
US3865554A (en) * 1971-09-23 1975-02-11 Little Inc A Pressure-and temperature-controlled apparatus for large-scale production of crystals by the czochralski technique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168590A (ja) * 1985-01-19 1986-07-30 Sumitomo Electric Ind Ltd 揮発性化合物半導体単結晶の製造方法

Also Published As

Publication number Publication date
DE2349736A1 (de) 1975-04-24
IT1022520B (it) 1978-04-20
FR2246306A1 (ja) 1975-05-02
BE820436A (fr) 1975-01-16
US4014656A (en) 1977-03-29

Similar Documents

Publication Publication Date Title
AR201758A1 (ja)
AU476761B2 (ja)
AU465372B2 (ja)
AR201235Q (ja)
AR201231Q (ja)
AU474593B2 (ja)
AU474511B2 (ja)
AU474838B2 (ja)
AU465453B2 (ja)
AU471343B2 (ja)
AU465434B2 (ja)
AU450229B2 (ja)
AU476714B2 (ja)
JPS5065479A (ja)
AR201229Q (ja)
AU476696B2 (ja)
AU472848B2 (ja)
AU466283B2 (ja)
AR199451A1 (ja)
AR197627A1 (ja)
AR196382A1 (ja)
AR200885A1 (ja)
AU461342B2 (ja)
AR193950A1 (ja)
AU447540B2 (ja)