JPS5058986A - - Google Patents

Info

Publication number
JPS5058986A
JPS5058986A JP49089915A JP8991574A JPS5058986A JP S5058986 A JPS5058986 A JP S5058986A JP 49089915 A JP49089915 A JP 49089915A JP 8991574 A JP8991574 A JP 8991574A JP S5058986 A JPS5058986 A JP S5058986A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49089915A
Other languages
Japanese (ja)
Other versions
JPS5248061B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5058986A publication Critical patent/JPS5058986A/ja
Publication of JPS5248061B2 publication Critical patent/JPS5248061B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP49089915A 1973-09-19 1974-08-07 Expired JPS5248061B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US398734A US3866013A (en) 1973-09-19 1973-09-19 Method and apparatus for controlling movable means such as an electron beam

Publications (2)

Publication Number Publication Date
JPS5058986A true JPS5058986A (enrdf_load_html_response) 1975-05-22
JPS5248061B2 JPS5248061B2 (enrdf_load_html_response) 1977-12-07

Family

ID=23576583

Family Applications (2)

Application Number Title Priority Date Filing Date
JP49089915A Expired JPS5248061B2 (enrdf_load_html_response) 1973-09-19 1974-08-07
JP5274177A Granted JPS5333584A (en) 1973-09-19 1977-05-10 Device for controlling charged beam

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP5274177A Granted JPS5333584A (en) 1973-09-19 1977-05-10 Device for controlling charged beam

Country Status (7)

Country Link
US (1) US3866013A (enrdf_load_html_response)
JP (2) JPS5248061B2 (enrdf_load_html_response)
CA (1) CA1013074A (enrdf_load_html_response)
DE (1) DE2443625C2 (enrdf_load_html_response)
FR (1) FR2244202B1 (enrdf_load_html_response)
GB (1) GB1438737A (enrdf_load_html_response)
IT (1) IT1020326B (enrdf_load_html_response)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (fr) * 1974-12-13 1976-07-09 Thomson Csf Dispositif pour le trace programme de dessins par bombardement de particules
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS5511303A (en) * 1978-07-10 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron-beam exposure device
JPS5521156A (en) * 1978-08-02 1980-02-15 Fujitsu Ltd Electronic beam exposing system
JPS5778814U (enrdf_load_html_response) * 1980-10-31 1982-05-15
DE102014105452B3 (de) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Anordnung zum Ablenken eines mittels einer Elektronenstrahlkanone erzeugten Elektronenstrahls, Verfahren zum Erzeugen eines Ablenksignals und Verfahren zum Betreiben einer Elektronenstrahlkanone
DE102014105451B3 (de) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Anordnung zum Ablenken eines mittels einer Elektronenstrahlkanone erzeugten Elektronenstrahls, Verfahren zum Erzeugen eines Ablenksignals und Verfahren zum Betreiben einer Elektronenstrahlkanone

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus

Also Published As

Publication number Publication date
US3866013A (en) 1975-02-11
FR2244202B1 (enrdf_load_html_response) 1976-10-22
JPS5333584A (en) 1978-03-29
DE2443625C2 (de) 1983-10-27
CA1013074A (en) 1977-06-28
DE2443625A1 (de) 1975-03-20
IT1020326B (it) 1977-12-20
JPS5328749B2 (enrdf_load_html_response) 1978-08-16
GB1438737A (en) 1976-06-09
JPS5248061B2 (enrdf_load_html_response) 1977-12-07
FR2244202A1 (enrdf_load_html_response) 1975-04-11

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