JPS5039876A - - Google Patents

Info

Publication number
JPS5039876A
JPS5039876A JP8964773A JP8964773A JPS5039876A JP S5039876 A JPS5039876 A JP S5039876A JP 8964773 A JP8964773 A JP 8964773A JP 8964773 A JP8964773 A JP 8964773A JP S5039876 A JPS5039876 A JP S5039876A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8964773A
Other languages
Japanese (ja)
Other versions
JPS5740650B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8964773A priority Critical patent/JPS5740650B2/ja
Priority to US05/495,678 priority patent/US3984301A/en
Publication of JPS5039876A publication Critical patent/JPS5039876A/ja
Publication of JPS5740650B2 publication Critical patent/JPS5740650B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8964773A 1973-08-11 1973-08-11 Expired JPS5740650B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (enrdf_load_stackoverflow) 1973-08-11 1973-08-11
US05/495,678 US3984301A (en) 1973-08-11 1974-08-08 Sputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (enrdf_load_stackoverflow) 1973-08-11 1973-08-11

Publications (2)

Publication Number Publication Date
JPS5039876A true JPS5039876A (enrdf_load_stackoverflow) 1975-04-12
JPS5740650B2 JPS5740650B2 (enrdf_load_stackoverflow) 1982-08-28

Family

ID=13976546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8964773A Expired JPS5740650B2 (enrdf_load_stackoverflow) 1973-08-11 1973-08-11

Country Status (1)

Country Link
JP (1) JPS5740650B2 (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS52116785A (en) * 1976-03-03 1977-09-30 Int Plasma Corp Method and apparatus for gas plasma reaction
JPS52123938A (en) * 1976-04-13 1977-10-18 Fujitsu Ltd Spatter etching method
JPS55175095U (enrdf_load_stackoverflow) * 1979-05-29 1980-12-15
JPS5635775A (en) * 1980-08-06 1981-04-08 Fujitsu Ltd Ion beam etching method
JPS60143633A (ja) * 1984-11-29 1985-07-29 Hitachi Ltd 半導体装置の製造方法
EP1061257A1 (en) 1999-06-15 2000-12-20 Fujikoki Corporation Regulating valve for variable displacement swash plate compressor and its assembly method
JP2009061407A (ja) * 2007-09-07 2009-03-26 Toto Sekisui Kk 沈降装置、沈殿処理システム及び沈降装置の製造方法
JP2010264409A (ja) * 2009-05-18 2010-11-25 Isomura Hosui Kiko Co Ltd 傾斜管ユニット及びその製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116785A (en) * 1976-03-03 1977-09-30 Int Plasma Corp Method and apparatus for gas plasma reaction
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS52123938A (en) * 1976-04-13 1977-10-18 Fujitsu Ltd Spatter etching method
JPS55175095U (enrdf_load_stackoverflow) * 1979-05-29 1980-12-15
JPS5635775A (en) * 1980-08-06 1981-04-08 Fujitsu Ltd Ion beam etching method
JPS60143633A (ja) * 1984-11-29 1985-07-29 Hitachi Ltd 半導体装置の製造方法
EP1061257A1 (en) 1999-06-15 2000-12-20 Fujikoki Corporation Regulating valve for variable displacement swash plate compressor and its assembly method
JP2009061407A (ja) * 2007-09-07 2009-03-26 Toto Sekisui Kk 沈降装置、沈殿処理システム及び沈降装置の製造方法
JP2010264409A (ja) * 2009-05-18 2010-11-25 Isomura Hosui Kiko Co Ltd 傾斜管ユニット及びその製造方法

Also Published As

Publication number Publication date
JPS5740650B2 (enrdf_load_stackoverflow) 1982-08-28

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