JPS5036341B1 - - Google Patents

Info

Publication number
JPS5036341B1
JPS5036341B1 JP47121277A JP12127772A JPS5036341B1 JP S5036341 B1 JPS5036341 B1 JP S5036341B1 JP 47121277 A JP47121277 A JP 47121277A JP 12127772 A JP12127772 A JP 12127772A JP S5036341 B1 JPS5036341 B1 JP S5036341B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47121277A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5036341B1 publication Critical patent/JPS5036341B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP47121277A 1966-03-01 1972-12-05 Pending JPS5036341B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US53081966A 1966-03-01 1966-03-01

Publications (1)

Publication Number Publication Date
JPS5036341B1 true JPS5036341B1 (ja) 1975-11-22

Family

ID=24115116

Family Applications (2)

Application Number Title Priority Date Filing Date
JP42004205A Pending JPS4814873B1 (ja) 1966-03-01 1967-01-23
JP47121277A Pending JPS5036341B1 (ja) 1966-03-01 1972-12-05

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP42004205A Pending JPS4814873B1 (ja) 1966-03-01 1967-01-23

Country Status (4)

Country Link
US (1) US3493770A (ja)
JP (2) JPS4814873B1 (ja)
FR (1) FR1522292A (ja)
GB (1) GB1111025A (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4949306B1 (ja) * 1969-08-20 1974-12-26
US3639718A (en) * 1970-06-15 1972-02-01 Little Inc A Pressure- and temperature-controlled crystal growing apparatus
US3740563A (en) * 1971-06-25 1973-06-19 Monsanto Co Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals
US3865554A (en) * 1971-09-23 1975-02-11 Little Inc A Pressure-and temperature-controlled apparatus for large-scale production of crystals by the czochralski technique
US3761692A (en) * 1971-10-01 1973-09-25 Texas Instruments Inc Automated crystal pulling system
US3882319A (en) * 1973-10-23 1975-05-06 Motorola Inc Automatic melt level control for growth of semiconductor crystals
US3998598A (en) * 1973-11-23 1976-12-21 Semimetals, Inc. Automatic diameter control for crystal growing facilities
DE2420899A1 (de) * 1974-04-30 1975-12-11 Wacker Chemitronic Verfahren zur herstellung von einkristallinem galliumarsenid
US3958129A (en) * 1974-08-05 1976-05-18 Motorola, Inc. Automatic crystal diameter control for growth of semiconductor crystals
US4058429A (en) * 1975-12-04 1977-11-15 Westinghouse Electric Corporation Infrared temperature control of Czochralski crystal growth
US4185076A (en) * 1977-03-17 1980-01-22 Mobil Tyco Solar Energy Corporation Apparatus for controlled growth of silicon and germanium crystal ribbons
US4184907A (en) * 1977-03-17 1980-01-22 Mobil Tyco Solar Energy Corporation Control of capillary die shaped crystal growth of silicon and germanium crystals
US4290835A (en) * 1978-06-14 1981-09-22 Mobil Tyco Solar Energy Corporation Method for crystal growth control
DE2923240A1 (de) * 1979-06-08 1980-12-18 Leybold Heraeus Gmbh & Co Kg Messverfahren und messanordnung fuer den durchmesser von einkristallen beim tiegelziehen
US4282184A (en) * 1979-10-09 1981-08-04 Siltec Corporation Continuous replenishment of molten semiconductor in a Czochralski-process, single-crystal-growing furnace
JPS5815098A (ja) * 1981-07-16 1983-01-28 Toshiba Corp 化合物半導体単結晶の製造方法
DE3219409C2 (de) * 1982-05-19 1984-10-11 Schweizerische Aluminium Ag, Chippis Verfahren zur Bestimmung der Oxidationsgeschwindigkeit an der Oberfläche einer Metallschmelze
US4511428A (en) * 1982-07-09 1985-04-16 International Business Machines Corporation Method of controlling oxygen content and distribution in grown silicon crystals
US4659423A (en) * 1986-04-28 1987-04-21 International Business Machines Corporation Semiconductor crystal growth via variable melt rotation
US5215620A (en) * 1989-09-19 1993-06-01 Shin-Etsu Handotai Co. Ltd. Method for pulling a silicon single crystal by imposing a periodic rotation rate on a constant rotation rate
US5269875A (en) * 1989-10-05 1993-12-14 Shin-Etsu Handotai Company, Limited Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method
US5037621A (en) * 1989-11-09 1991-08-06 The United States Of America As Represented By The Secretary Of The Army System for the in-situ visualization of a solid liquid interface during crystal growth
JPH0785489B2 (ja) * 1991-02-08 1995-09-13 信越半導体株式会社 単結晶の直径計測方法
US5593498A (en) * 1995-06-09 1997-01-14 Memc Electronic Materials, Inc. Apparatus for rotating a crucible of a crystal pulling machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246907A (en) * 1940-04-12 1941-06-24 William R Webster Continuous molding machine
US2979386A (en) * 1956-08-02 1961-04-11 Shockley William Crystal growing apparatus
NL253106A (ja) * 1960-06-25
US3291650A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Control of crystal size
US3337303A (en) * 1965-03-01 1967-08-22 Elmat Corp Crystal growing apparatus

Also Published As

Publication number Publication date
DE1619967A1 (de) 1970-07-30
FR1522292A (fr) 1968-04-26
GB1111025A (en) 1968-04-24
DE1619967B2 (de) 1972-06-08
US3493770A (en) 1970-02-03
JPS4814873B1 (ja) 1973-05-10

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