JPS502968A - - Google Patents

Info

Publication number
JPS502968A
JPS502968A JP48101301A JP10130173A JPS502968A JP S502968 A JPS502968 A JP S502968A JP 48101301 A JP48101301 A JP 48101301A JP 10130173 A JP10130173 A JP 10130173A JP S502968 A JPS502968 A JP S502968A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48101301A
Other languages
Japanese (ja)
Other versions
JPS543743B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS502968A publication Critical patent/JPS502968A/ja
Publication of JPS543743B2 publication Critical patent/JPS543743B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
JP10130173A 1973-04-09 1973-09-10 Expired JPS543743B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00349169A US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter

Publications (2)

Publication Number Publication Date
JPS502968A true JPS502968A (enExample) 1975-01-13
JPS543743B2 JPS543743B2 (enExample) 1979-02-26

Family

ID=23371193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10130173A Expired JPS543743B2 (enExample) 1973-04-09 1973-09-10

Country Status (2)

Country Link
US (1) US3851526A (enExample)
JP (1) JPS543743B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810705U (ja) * 1981-07-10 1983-01-24 日本光電工業株式会社 呼吸流量計の抵抗管
JP2007041870A (ja) * 2005-08-03 2007-02-15 Horiba Stec Co Ltd ガス流量制御方法
US10310521B2 (en) 2016-04-07 2019-06-04 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4340050A (en) * 1980-12-29 1982-07-20 Delmed Inc. Medical fluid flow rate indicating/controlling device
US4375813A (en) * 1981-02-10 1983-03-08 Delmed, Inc. Medical fluid flow rate controlling device
NL8104354A (nl) * 1981-09-22 1983-04-18 Wijbren Jouwsma Laminair stromingselement.
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4555939A (en) * 1984-03-19 1985-12-03 Honeywell Inc. Condition responsive sensor for fluid flow measurement
US4672997A (en) * 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
US5044199A (en) * 1989-11-13 1991-09-03 Dxl International, Inc. Flowmeter
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5142907A (en) * 1991-04-17 1992-09-01 Mks Instruments, Inc. Constant temperature gradient fluid mass flow transducer
NL9200414A (nl) * 1992-03-06 1993-10-01 Bronkhorst High Tech Bv Laminair stromingselement met geintegreerd turbulentiefilter.
US5511416A (en) * 1993-09-15 1996-04-30 Alicat Scientific, Inc. Wide range laminar flow element
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
JP3188375B2 (ja) * 1994-12-12 2001-07-16 日本エム・ケー・エス株式会社 層流素子
US5576498A (en) * 1995-11-01 1996-11-19 The Rosaen Company Laminar flow element for a flowmeter
US5763791A (en) * 1995-11-01 1998-06-09 The Rosaen Company Flowmeter
US5804717A (en) * 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5868159A (en) 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US6338277B1 (en) * 1997-06-06 2002-01-15 G. Kromschroder Aktiengesellschaft Flowmeter for attenuating acoustic propagations
US6631334B2 (en) 2000-12-26 2003-10-07 Mks Instruments, Inc. Pressure-based mass flow controller system
US6668641B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor
US6668642B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
US6779394B2 (en) 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US7431045B2 (en) * 2002-08-28 2008-10-07 Horiba Stec, Co., Ltd. Flow restrictor
US8376312B2 (en) * 2003-08-28 2013-02-19 Horiba, Ltd. Flow restrictor
KR20060134085A (ko) * 2004-02-27 2006-12-27 가부시키가이샤 호리바 에스텍 유량제한기
US7117104B2 (en) * 2004-06-28 2006-10-03 Celerity, Inc. Ultrasonic liquid flow controller
US7584665B2 (en) * 2005-01-14 2009-09-08 Kulite Semiconductor Products, Inc. Combustion transducer apparatus employing pressure restriction means
US7360448B2 (en) * 2005-08-12 2008-04-22 Celerity, Inc. Ultrasonic flow sensor having reflecting interface
US8881768B2 (en) 2009-05-27 2014-11-11 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
EP2455724B1 (de) 2010-11-18 2016-09-21 Axetris AG Flusssensor
US20140264132A1 (en) 2013-03-15 2014-09-18 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
NO20130583A1 (no) * 2013-04-29 2014-10-30 Typhonix As Separasjonsvennlig trykkreduksjonsinnretning
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
NL2017185B1 (en) * 2016-07-18 2018-01-24 A De Kock Holding B V Laminar flow module
DE102019110073A1 (de) * 2019-04-16 2020-10-22 Burkert S.A.S. Strömungswiderstandseinsatz und Durchflussmess- oder Durchflussregeleinrichtung
US11841036B2 (en) 2019-08-05 2023-12-12 Ichor Systems, Inc. Laminar flow restrictor and seal for same
KR102834666B1 (ko) * 2019-08-05 2025-07-17 아이커 시스템즈, 인크. 유량 제한기용 밀봉부
KR102667577B1 (ko) 2019-08-05 2024-05-22 아이커 시스템즈, 인크. 층류 제한기
US12220657B2 (en) * 2021-04-30 2025-02-11 Pall Corporation Filter disk segments
US12203493B2 (en) * 2022-01-10 2025-01-21 Horiba Stec, Co., Ltd. Flow restrictor for fluid flow device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330156A (en) * 1965-09-08 1967-07-11 Jesse W Thomas Fluid flowmeters

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1559547A (en) * 1920-03-25 1925-11-03 Francis H Brown Pressure-responsive device
US1870849A (en) * 1928-06-09 1932-08-09 Hodgson John Lawrence Flow quantity meter
US3071160A (en) * 1959-07-01 1963-01-01 Nat Instr Lab Inc Fluid restrictor for linear flow meters
US3613448A (en) * 1969-11-26 1971-10-19 Teledyne Inc Fluid flow measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330156A (en) * 1965-09-08 1967-07-11 Jesse W Thomas Fluid flowmeters

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810705U (ja) * 1981-07-10 1983-01-24 日本光電工業株式会社 呼吸流量計の抵抗管
JP2007041870A (ja) * 2005-08-03 2007-02-15 Horiba Stec Co Ltd ガス流量制御方法
US10310521B2 (en) 2016-04-07 2019-06-04 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller

Also Published As

Publication number Publication date
JPS543743B2 (enExample) 1979-02-26
US3851526A (en) 1974-12-03

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