JPS501787A - - Google Patents
Info
- Publication number
- JPS501787A JPS501787A JP4906973A JP4906973A JPS501787A JP S501787 A JPS501787 A JP S501787A JP 4906973 A JP4906973 A JP 4906973A JP 4906973 A JP4906973 A JP 4906973A JP S501787 A JPS501787 A JP S501787A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4906973A JPS5513299B2 (en) | 1973-05-04 | 1973-05-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4906973A JPS5513299B2 (en) | 1973-05-04 | 1973-05-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS501787A true JPS501787A (en) | 1975-01-09 |
JPS5513299B2 JPS5513299B2 (en) | 1980-04-08 |
Family
ID=12820778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4906973A Expired JPS5513299B2 (en) | 1973-05-04 | 1973-05-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513299B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120975A (en) * | 1974-03-11 | 1975-09-22 | ||
JPS5394770A (en) * | 1977-01-31 | 1978-08-19 | Hitachi Ltd | Photo mask |
JPS6267548A (en) * | 1985-09-20 | 1987-03-27 | Fujitsu Ltd | Photomask |
JP2016156696A (en) * | 2015-02-24 | 2016-09-01 | アズビル株式会社 | Particle detection device |
-
1973
- 1973-05-04 JP JP4906973A patent/JPS5513299B2/ja not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120975A (en) * | 1974-03-11 | 1975-09-22 | ||
JPS5394770A (en) * | 1977-01-31 | 1978-08-19 | Hitachi Ltd | Photo mask |
JPS5411668B2 (en) * | 1977-01-31 | 1979-05-16 | ||
JPS6267548A (en) * | 1985-09-20 | 1987-03-27 | Fujitsu Ltd | Photomask |
JP2016156696A (en) * | 2015-02-24 | 2016-09-01 | アズビル株式会社 | Particle detection device |
Also Published As
Publication number | Publication date |
---|---|
JPS5513299B2 (en) | 1980-04-08 |