JPS50159249A - - Google Patents
Info
- Publication number
- JPS50159249A JPS50159249A JP49066005A JP6600574A JPS50159249A JP S50159249 A JPS50159249 A JP S50159249A JP 49066005 A JP49066005 A JP 49066005A JP 6600574 A JP6600574 A JP 6600574A JP S50159249 A JPS50159249 A JP S50159249A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49066005A JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49066005A JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50159249A true JPS50159249A (ja) | 1975-12-23 |
| JPS5246831B2 JPS5246831B2 (ja) | 1977-11-28 |
Family
ID=13303385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49066005A Expired JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5246831B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844336A (ja) * | 1981-09-10 | 1983-03-15 | Rigaku Denki Kk | 試料位置設定方法およびその装置 |
| JPH02190751A (ja) * | 1989-01-20 | 1990-07-26 | Shin Etsu Handotai Co Ltd | 半導体ウエーハの表裏および方位判定検査装置 |
-
1974
- 1974-06-12 JP JP49066005A patent/JPS5246831B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844336A (ja) * | 1981-09-10 | 1983-03-15 | Rigaku Denki Kk | 試料位置設定方法およびその装置 |
| JPH02190751A (ja) * | 1989-01-20 | 1990-07-26 | Shin Etsu Handotai Co Ltd | 半導体ウエーハの表裏および方位判定検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5246831B2 (ja) | 1977-11-28 |