JPS5246831B2 - - Google Patents
Info
- Publication number
- JPS5246831B2 JPS5246831B2 JP49066005A JP6600574A JPS5246831B2 JP S5246831 B2 JPS5246831 B2 JP S5246831B2 JP 49066005 A JP49066005 A JP 49066005A JP 6600574 A JP6600574 A JP 6600574A JP S5246831 B2 JPS5246831 B2 JP S5246831B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49066005A JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49066005A JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50159249A JPS50159249A (ja) | 1975-12-23 |
| JPS5246831B2 true JPS5246831B2 (ja) | 1977-11-28 |
Family
ID=13303385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49066005A Expired JPS5246831B2 (ja) | 1974-06-12 | 1974-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5246831B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844336A (ja) * | 1981-09-10 | 1983-03-15 | Rigaku Denki Kk | 試料位置設定方法およびその装置 |
| JP2683933B2 (ja) * | 1989-01-20 | 1997-12-03 | 信越半導体株式会社 | 半導体ウエーハの表裏および方位判定検査装置 |
-
1974
- 1974-06-12 JP JP49066005A patent/JPS5246831B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50159249A (ja) | 1975-12-23 |