JPS50137079A - - Google Patents
Info
- Publication number
- JPS50137079A JPS50137079A JP4224474A JP4224474A JPS50137079A JP S50137079 A JPS50137079 A JP S50137079A JP 4224474 A JP4224474 A JP 4224474A JP 4224474 A JP4224474 A JP 4224474A JP S50137079 A JPS50137079 A JP S50137079A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4224474A JPS5333437B2 (cs) | 1974-04-17 | 1974-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4224474A JPS5333437B2 (cs) | 1974-04-17 | 1974-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50137079A true JPS50137079A (cs) | 1975-10-30 |
| JPS5333437B2 JPS5333437B2 (cs) | 1978-09-13 |
Family
ID=12630603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4224474A Expired JPS5333437B2 (cs) | 1974-04-17 | 1974-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5333437B2 (cs) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52122123A (en) * | 1976-05-12 | 1977-10-14 | Akai Electric | Method and device for coating resist film |
| JPS544936A (en) * | 1977-06-14 | 1979-01-16 | Nat Jutaku Kenzai | Rotary coating method of viscous material and apparatus therefor |
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS54139483A (en) * | 1978-04-21 | 1979-10-29 | Hitachi Ltd | Photo resist coating device |
| JP2020096062A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理チャンバおよび基板処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891735U (ja) * | 1981-12-12 | 1983-06-21 | 橋本 茂夫 | ストロボアダプタ |
-
1974
- 1974-04-17 JP JP4224474A patent/JPS5333437B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52122123A (en) * | 1976-05-12 | 1977-10-14 | Akai Electric | Method and device for coating resist film |
| JPS544936A (en) * | 1977-06-14 | 1979-01-16 | Nat Jutaku Kenzai | Rotary coating method of viscous material and apparatus therefor |
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS54139483A (en) * | 1978-04-21 | 1979-10-29 | Hitachi Ltd | Photo resist coating device |
| JP2020096062A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理チャンバおよび基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5333437B2 (cs) | 1978-09-13 |