JPS50136333A - - Google Patents

Info

Publication number
JPS50136333A
JPS50136333A JP4225174A JP4225174A JPS50136333A JP S50136333 A JPS50136333 A JP S50136333A JP 4225174 A JP4225174 A JP 4225174A JP 4225174 A JP4225174 A JP 4225174A JP S50136333 A JPS50136333 A JP S50136333A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4225174A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4225174A priority Critical patent/JPS50136333A/ja
Publication of JPS50136333A publication Critical patent/JPS50136333A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP4225174A 1974-04-17 1974-04-17 Pending JPS50136333A (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4225174A JPS50136333A (sv) 1974-04-17 1974-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4225174A JPS50136333A (sv) 1974-04-17 1974-04-17

Publications (1)

Publication Number Publication Date
JPS50136333A true JPS50136333A (sv) 1975-10-29

Family

ID=12630796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4225174A Pending JPS50136333A (sv) 1974-04-17 1974-04-17

Country Status (1)

Country Link
JP (1) JPS50136333A (sv)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546467A (en) * 1977-06-16 1979-01-18 Matsushita Electric Ind Co Ltd Equipment and method for applying resin film
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer
JPS5896396U (ja) * 1981-12-23 1983-06-30 パイオニア株式会社 スピ−カ用ダンパ
JPS58207631A (ja) * 1982-05-28 1983-12-03 Toshiba Corp レジスト塗布方法
JPS6088428A (ja) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd 半導体塗布拡散方法
JPS60115224A (ja) * 1983-11-28 1985-06-21 Fuji Xerox Co Ltd レジスト塗布方法
JPS60182534A (ja) * 1984-03-01 1985-09-18 Matsushita Electric Ind Co Ltd 光学式ディスク保護膜塗付方法およびディスク
JPS61285716A (ja) * 1985-06-12 1986-12-16 Hitachi Ltd レジスト塗布方法
JPS63177329A (ja) * 1980-08-11 1988-07-21 デイスコビジョン　アソシエイツ フォトレジスト層を塗布する方法
JPS6490034A (en) * 1987-09-30 1989-04-05 Hitachi Electr Eng Device for applying thin film forming substance
JPH0248078A (ja) * 1988-08-08 1990-02-16 Toppan Printing Co Ltd スピンコート方法
JPH02158122A (ja) * 1988-12-12 1990-06-18 Tokyo Electron Ltd レジスト吐出方法
JPH06310496A (ja) * 1993-04-15 1994-11-04 Korea Electron Telecommun 半導体製造装置および半導体素子の製造方法
JP2015223556A (ja) * 2014-05-28 2015-12-14 株式会社ディスコ 保護被膜の被覆方法

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546467A (en) * 1977-06-16 1979-01-18 Matsushita Electric Ind Co Ltd Equipment and method for applying resin film
JPH0346895B2 (sv) * 1980-08-11 1991-07-17 Discovision Ass
JPS63177329A (ja) * 1980-08-11 1988-07-21 デイスコビジョン　アソシエイツ フォトレジスト層を塗布する方法
JPS6226579B2 (sv) * 1980-10-17 1987-06-09 Hitachi Ltd
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer
JPS5896396U (ja) * 1981-12-23 1983-06-30 パイオニア株式会社 スピ−カ用ダンパ
JPS623991Y2 (sv) * 1981-12-23 1987-01-29
JPS58207631A (ja) * 1982-05-28 1983-12-03 Toshiba Corp レジスト塗布方法
JPH046086B2 (sv) * 1982-05-28 1992-02-04 Tokyo Shibaura Electric Co
JPS6088428A (ja) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd 半導体塗布拡散方法
JPS60115224A (ja) * 1983-11-28 1985-06-21 Fuji Xerox Co Ltd レジスト塗布方法
JPS60182534A (ja) * 1984-03-01 1985-09-18 Matsushita Electric Ind Co Ltd 光学式ディスク保護膜塗付方法およびディスク
JPH0670861B2 (ja) * 1984-03-01 1994-09-07 松下電器産業株式会社 光学式ディスク保護膜塗付方法およびディスク
JPS61285716A (ja) * 1985-06-12 1986-12-16 Hitachi Ltd レジスト塗布方法
JPS6490034A (en) * 1987-09-30 1989-04-05 Hitachi Electr Eng Device for applying thin film forming substance
JPH0248078A (ja) * 1988-08-08 1990-02-16 Toppan Printing Co Ltd スピンコート方法
JPH02158122A (ja) * 1988-12-12 1990-06-18 Tokyo Electron Ltd レジスト吐出方法
JPH06310496A (ja) * 1993-04-15 1994-11-04 Korea Electron Telecommun 半導体製造装置および半導体素子の製造方法
JP2015223556A (ja) * 2014-05-28 2015-12-14 株式会社ディスコ 保護被膜の被覆方法

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