JPS546467A - Equipment and method for applying resin film - Google Patents
Equipment and method for applying resin filmInfo
- Publication number
- JPS546467A JPS546467A JP7186277A JP7186277A JPS546467A JP S546467 A JPS546467 A JP S546467A JP 7186277 A JP7186277 A JP 7186277A JP 7186277 A JP7186277 A JP 7186277A JP S546467 A JPS546467 A JP S546467A
- Authority
- JP
- Japan
- Prior art keywords
- equipment
- resin film
- applying resin
- applying
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To simplify fine-pattern formation by preventing resin from scattering with the starting time of a motor made long when rotation-applying resin.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7186277A JPS546467A (en) | 1977-06-16 | 1977-06-16 | Equipment and method for applying resin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7186277A JPS546467A (en) | 1977-06-16 | 1977-06-16 | Equipment and method for applying resin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546467A true JPS546467A (en) | 1979-01-18 |
Family
ID=13472743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7186277A Pending JPS546467A (en) | 1977-06-16 | 1977-06-16 | Equipment and method for applying resin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546467A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599919A (en) * | 1982-07-08 | 1984-01-19 | M Setetsuku Kk | Applying method for photo-resist |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48833U (en) * | 1971-05-25 | 1973-01-08 | ||
JPS50136333A (en) * | 1974-04-17 | 1975-10-29 |
-
1977
- 1977-06-16 JP JP7186277A patent/JPS546467A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48833U (en) * | 1971-05-25 | 1973-01-08 | ||
JPS50136333A (en) * | 1974-04-17 | 1975-10-29 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599919A (en) * | 1982-07-08 | 1984-01-19 | M Setetsuku Kk | Applying method for photo-resist |
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