JPS546467A - Equipment and method for applying resin film - Google Patents

Equipment and method for applying resin film

Info

Publication number
JPS546467A
JPS546467A JP7186277A JP7186277A JPS546467A JP S546467 A JPS546467 A JP S546467A JP 7186277 A JP7186277 A JP 7186277A JP 7186277 A JP7186277 A JP 7186277A JP S546467 A JPS546467 A JP S546467A
Authority
JP
Japan
Prior art keywords
equipment
resin film
applying resin
applying
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7186277A
Other languages
Japanese (ja)
Inventor
Hiroshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7186277A priority Critical patent/JPS546467A/en
Publication of JPS546467A publication Critical patent/JPS546467A/en
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To simplify fine-pattern formation by preventing resin from scattering with the starting time of a motor made long when rotation-applying resin.
COPYRIGHT: (C)1979,JPO&Japio
JP7186277A 1977-06-16 1977-06-16 Equipment and method for applying resin film Pending JPS546467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7186277A JPS546467A (en) 1977-06-16 1977-06-16 Equipment and method for applying resin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7186277A JPS546467A (en) 1977-06-16 1977-06-16 Equipment and method for applying resin film

Publications (1)

Publication Number Publication Date
JPS546467A true JPS546467A (en) 1979-01-18

Family

ID=13472743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7186277A Pending JPS546467A (en) 1977-06-16 1977-06-16 Equipment and method for applying resin film

Country Status (1)

Country Link
JP (1) JPS546467A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599919A (en) * 1982-07-08 1984-01-19 M Setetsuku Kk Applying method for photo-resist

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48833U (en) * 1971-05-25 1973-01-08
JPS50136333A (en) * 1974-04-17 1975-10-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48833U (en) * 1971-05-25 1973-01-08
JPS50136333A (en) * 1974-04-17 1975-10-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599919A (en) * 1982-07-08 1984-01-19 M Setetsuku Kk Applying method for photo-resist

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