JPS50130369A - - Google Patents

Info

Publication number
JPS50130369A
JPS50130369A JP3677674A JP3677674A JPS50130369A JP S50130369 A JPS50130369 A JP S50130369A JP 3677674 A JP3677674 A JP 3677674A JP 3677674 A JP3677674 A JP 3677674A JP S50130369 A JPS50130369 A JP S50130369A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3677674A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3677674A priority Critical patent/JPS50130369A/ja
Publication of JPS50130369A publication Critical patent/JPS50130369A/ja
Pending legal-status Critical Current

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Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3677674A 1974-04-01 1974-04-01 Pending JPS50130369A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3677674A JPS50130369A (enrdf_load_stackoverflow) 1974-04-01 1974-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3677674A JPS50130369A (enrdf_load_stackoverflow) 1974-04-01 1974-04-01

Publications (1)

Publication Number Publication Date
JPS50130369A true JPS50130369A (enrdf_load_stackoverflow) 1975-10-15

Family

ID=12479160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3677674A Pending JPS50130369A (enrdf_load_stackoverflow) 1974-04-01 1974-04-01

Country Status (1)

Country Link
JP (1) JPS50130369A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181537A (en) * 1981-05-01 1982-11-09 Agency Of Ind Science & Technol Light pattern projector
JPS5833827A (ja) * 1981-08-22 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 気相エピタキシヤル成長法
JPS5839271U (ja) * 1981-09-04 1983-03-15 ソニー株式会社 ゴルフ・スウイング練習機
JPS5892216A (ja) * 1981-11-27 1983-06-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS58192330A (ja) * 1982-05-06 1983-11-09 Oak Seisakusho:Kk シリコンウエハ−の表面酸化処理方法
JPS5948977A (ja) * 1982-09-14 1984-03-21 Nec Corp レ−ザダイオ−ドの製造方法
JPS5961124A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 薄膜形成方法
JPS5967623A (ja) * 1982-10-09 1984-04-17 Mitsubishi Electric Corp 半導体装置の加工方法
JPS59127833A (ja) * 1983-01-12 1984-07-23 Agency Of Ind Science & Technol 励起気相析出法による薄膜の製造装置
JPS59220925A (ja) * 1983-05-31 1984-12-12 Toshiba Corp ドライエッチング方法
JPS60211860A (ja) * 1984-04-05 1985-10-24 Fuji Electric Corp Res & Dev Ltd 多層導電膜パタ−ンの形成方法
JPS60211843A (ja) * 1984-04-05 1985-10-24 Fuji Electric Corp Res & Dev Ltd 絶縁膜パタ−ンの形成方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181537A (en) * 1981-05-01 1982-11-09 Agency Of Ind Science & Technol Light pattern projector
JPS5833827A (ja) * 1981-08-22 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 気相エピタキシヤル成長法
JPS5839271U (ja) * 1981-09-04 1983-03-15 ソニー株式会社 ゴルフ・スウイング練習機
JPS5892216A (ja) * 1981-11-27 1983-06-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS58192330A (ja) * 1982-05-06 1983-11-09 Oak Seisakusho:Kk シリコンウエハ−の表面酸化処理方法
JPS5948977A (ja) * 1982-09-14 1984-03-21 Nec Corp レ−ザダイオ−ドの製造方法
JPS5961124A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 薄膜形成方法
JPS5967623A (ja) * 1982-10-09 1984-04-17 Mitsubishi Electric Corp 半導体装置の加工方法
JPS59127833A (ja) * 1983-01-12 1984-07-23 Agency Of Ind Science & Technol 励起気相析出法による薄膜の製造装置
JPS59220925A (ja) * 1983-05-31 1984-12-12 Toshiba Corp ドライエッチング方法
JPS60211860A (ja) * 1984-04-05 1985-10-24 Fuji Electric Corp Res & Dev Ltd 多層導電膜パタ−ンの形成方法
JPS60211843A (ja) * 1984-04-05 1985-10-24 Fuji Electric Corp Res & Dev Ltd 絶縁膜パタ−ンの形成方法

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