JPS50127574A - - Google Patents
Info
- Publication number
- JPS50127574A JPS50127574A JP3353774A JP3353774A JPS50127574A JP S50127574 A JPS50127574 A JP S50127574A JP 3353774 A JP3353774 A JP 3353774A JP 3353774 A JP3353774 A JP 3353774A JP S50127574 A JPS50127574 A JP S50127574A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Image Analysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3353774A JPS50127574A (sv) | 1974-03-27 | 1974-03-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3353774A JPS50127574A (sv) | 1974-03-27 | 1974-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50127574A true JPS50127574A (sv) | 1975-10-07 |
Family
ID=12389301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3353774A Pending JPS50127574A (sv) | 1974-03-27 | 1974-03-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50127574A (sv) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5345589A (en) * | 1976-10-06 | 1978-04-24 | Yokohama Rubber Co Ltd | Tension tester |
JPS55105329A (en) * | 1978-12-28 | 1980-08-12 | Fujitsu Ltd | Inspecting method for pattern |
JPS5860538A (ja) * | 1981-10-06 | 1983-04-11 | Fujitsu Ltd | パタ−ン検査方法 |
JPS58100438A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | パタ−ン検査装置 |
JPS58168228A (ja) * | 1982-08-24 | 1983-10-04 | Fujitsu Ltd | フオトマスクの比較検査方法と装置 |
JPS58179343A (ja) * | 1982-04-14 | 1983-10-20 | Nec Corp | 図形検査方法 |
JPS58223328A (ja) * | 1982-06-22 | 1983-12-24 | Toshiba Corp | マスク欠陥検査装置 |
JPS59132129A (ja) * | 1983-01-19 | 1984-07-30 | Hitachi Ltd | 欠陥検査装置 |
JPS60250629A (ja) * | 1984-05-25 | 1985-12-11 | Fujitsu Ltd | マスクの検査方法 |
JPS61120046A (ja) * | 1984-11-16 | 1986-06-07 | Mitsubishi Electric Corp | 物品検査装置 |
JPS62113436A (ja) * | 1985-11-13 | 1987-05-25 | Toshiba Corp | 半導体ペレツトの外観検査方法 |
JPS63228163A (ja) * | 1987-03-17 | 1988-09-22 | Toppan Printing Co Ltd | 検版装置 |
JPH0695012B2 (ja) * | 1983-03-15 | 1994-11-24 | アイヴィピー インテグレイテッド ヴイジョン プロダクツ アクチボラグ | マトリックス状に配列されたフォトダイオ−ド・アレイのための装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4898886A (sv) * | 1972-03-29 | 1973-12-14 |
-
1974
- 1974-03-27 JP JP3353774A patent/JPS50127574A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4898886A (sv) * | 1972-03-29 | 1973-12-14 |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5618086B2 (sv) * | 1976-10-06 | 1981-04-27 | ||
JPS5345589A (en) * | 1976-10-06 | 1978-04-24 | Yokohama Rubber Co Ltd | Tension tester |
JPS6227533B2 (sv) * | 1978-12-28 | 1987-06-15 | Fujitsu Ltd | |
JPS55105329A (en) * | 1978-12-28 | 1980-08-12 | Fujitsu Ltd | Inspecting method for pattern |
JPS5860538A (ja) * | 1981-10-06 | 1983-04-11 | Fujitsu Ltd | パタ−ン検査方法 |
JPS6239816B2 (sv) * | 1981-10-06 | 1987-08-25 | Fujitsu Ltd | |
JPS58100438A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | パタ−ン検査装置 |
JPS58179343A (ja) * | 1982-04-14 | 1983-10-20 | Nec Corp | 図形検査方法 |
JPS58223328A (ja) * | 1982-06-22 | 1983-12-24 | Toshiba Corp | マスク欠陥検査装置 |
JPS58168228A (ja) * | 1982-08-24 | 1983-10-04 | Fujitsu Ltd | フオトマスクの比較検査方法と装置 |
JPS632136B2 (sv) * | 1982-08-24 | 1988-01-18 | Fujitsu Ltd | |
JPS59132129A (ja) * | 1983-01-19 | 1984-07-30 | Hitachi Ltd | 欠陥検査装置 |
JPH0478980B2 (sv) * | 1983-01-19 | 1992-12-14 | Hitachi Ltd | |
JPH0695012B2 (ja) * | 1983-03-15 | 1994-11-24 | アイヴィピー インテグレイテッド ヴイジョン プロダクツ アクチボラグ | マトリックス状に配列されたフォトダイオ−ド・アレイのための装置 |
JPS60250629A (ja) * | 1984-05-25 | 1985-12-11 | Fujitsu Ltd | マスクの検査方法 |
JPH048780B2 (sv) * | 1984-05-25 | 1992-02-18 | ||
JPS61120046A (ja) * | 1984-11-16 | 1986-06-07 | Mitsubishi Electric Corp | 物品検査装置 |
JPS62113436A (ja) * | 1985-11-13 | 1987-05-25 | Toshiba Corp | 半導体ペレツトの外観検査方法 |
JPS63228163A (ja) * | 1987-03-17 | 1988-09-22 | Toppan Printing Co Ltd | 検版装置 |