JPS50127574A - - Google Patents

Info

Publication number
JPS50127574A
JPS50127574A JP3353774A JP3353774A JPS50127574A JP S50127574 A JPS50127574 A JP S50127574A JP 3353774 A JP3353774 A JP 3353774A JP 3353774 A JP3353774 A JP 3353774A JP S50127574 A JPS50127574 A JP S50127574A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3353774A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3353774A priority Critical patent/JPS50127574A/ja
Publication of JPS50127574A publication Critical patent/JPS50127574A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Analysis (AREA)
JP3353774A 1974-03-27 1974-03-27 Pending JPS50127574A (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3353774A JPS50127574A (sv) 1974-03-27 1974-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3353774A JPS50127574A (sv) 1974-03-27 1974-03-27

Publications (1)

Publication Number Publication Date
JPS50127574A true JPS50127574A (sv) 1975-10-07

Family

ID=12389301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3353774A Pending JPS50127574A (sv) 1974-03-27 1974-03-27

Country Status (1)

Country Link
JP (1) JPS50127574A (sv)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345589A (en) * 1976-10-06 1978-04-24 Yokohama Rubber Co Ltd Tension tester
JPS55105329A (en) * 1978-12-28 1980-08-12 Fujitsu Ltd Inspecting method for pattern
JPS5860538A (ja) * 1981-10-06 1983-04-11 Fujitsu Ltd パタ−ン検査方法
JPS58100438A (ja) * 1981-12-11 1983-06-15 Hitachi Ltd パタ−ン検査装置
JPS58168228A (ja) * 1982-08-24 1983-10-04 Fujitsu Ltd フオトマスクの比較検査方法と装置
JPS58179343A (ja) * 1982-04-14 1983-10-20 Nec Corp 図形検査方法
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS59132129A (ja) * 1983-01-19 1984-07-30 Hitachi Ltd 欠陥検査装置
JPS60250629A (ja) * 1984-05-25 1985-12-11 Fujitsu Ltd マスクの検査方法
JPS61120046A (ja) * 1984-11-16 1986-06-07 Mitsubishi Electric Corp 物品検査装置
JPS62113436A (ja) * 1985-11-13 1987-05-25 Toshiba Corp 半導体ペレツトの外観検査方法
JPS63228163A (ja) * 1987-03-17 1988-09-22 Toppan Printing Co Ltd 検版装置
JPH0695012B2 (ja) * 1983-03-15 1994-11-24 アイヴィピー インテグレイテッド ヴイジョン プロダクツ アクチボラグ マトリックス状に配列されたフォトダイオ−ド・アレイのための装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4898886A (sv) * 1972-03-29 1973-12-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4898886A (sv) * 1972-03-29 1973-12-14

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618086B2 (sv) * 1976-10-06 1981-04-27
JPS5345589A (en) * 1976-10-06 1978-04-24 Yokohama Rubber Co Ltd Tension tester
JPS6227533B2 (sv) * 1978-12-28 1987-06-15 Fujitsu Ltd
JPS55105329A (en) * 1978-12-28 1980-08-12 Fujitsu Ltd Inspecting method for pattern
JPS5860538A (ja) * 1981-10-06 1983-04-11 Fujitsu Ltd パタ−ン検査方法
JPS6239816B2 (sv) * 1981-10-06 1987-08-25 Fujitsu Ltd
JPS58100438A (ja) * 1981-12-11 1983-06-15 Hitachi Ltd パタ−ン検査装置
JPS58179343A (ja) * 1982-04-14 1983-10-20 Nec Corp 図形検査方法
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS58168228A (ja) * 1982-08-24 1983-10-04 Fujitsu Ltd フオトマスクの比較検査方法と装置
JPS632136B2 (sv) * 1982-08-24 1988-01-18 Fujitsu Ltd
JPS59132129A (ja) * 1983-01-19 1984-07-30 Hitachi Ltd 欠陥検査装置
JPH0478980B2 (sv) * 1983-01-19 1992-12-14 Hitachi Ltd
JPH0695012B2 (ja) * 1983-03-15 1994-11-24 アイヴィピー インテグレイテッド ヴイジョン プロダクツ アクチボラグ マトリックス状に配列されたフォトダイオ−ド・アレイのための装置
JPS60250629A (ja) * 1984-05-25 1985-12-11 Fujitsu Ltd マスクの検査方法
JPH048780B2 (sv) * 1984-05-25 1992-02-18
JPS61120046A (ja) * 1984-11-16 1986-06-07 Mitsubishi Electric Corp 物品検査装置
JPS62113436A (ja) * 1985-11-13 1987-05-25 Toshiba Corp 半導体ペレツトの外観検査方法
JPS63228163A (ja) * 1987-03-17 1988-09-22 Toppan Printing Co Ltd 検版装置

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