JPS50126181A - - Google Patents

Info

Publication number
JPS50126181A
JPS50126181A JP50022357A JP2235775A JPS50126181A JP S50126181 A JPS50126181 A JP S50126181A JP 50022357 A JP50022357 A JP 50022357A JP 2235775 A JP2235775 A JP 2235775A JP S50126181 A JPS50126181 A JP S50126181A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50022357A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50126181A publication Critical patent/JPS50126181A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
  • Weting (AREA)
JP50022357A 1974-02-26 1975-02-22 Pending JPS50126181A (en, 2012)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7406492A FR2262406B1 (en, 2012) 1974-02-26 1974-02-26

Publications (1)

Publication Number Publication Date
JPS50126181A true JPS50126181A (en, 2012) 1975-10-03

Family

ID=9135457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50022357A Pending JPS50126181A (en, 2012) 1974-02-26 1975-02-22

Country Status (7)

Country Link
JP (1) JPS50126181A (en, 2012)
BE (1) BE825855A (en, 2012)
DE (1) DE2508091A1 (en, 2012)
FR (1) FR2262406B1 (en, 2012)
GB (1) GB1480129A (en, 2012)
IT (1) IT1030218B (en, 2012)
NL (1) NL7502154A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01503026A (ja) * 1987-01-27 1989-10-12 アドバンスト マイクロ デバイシス,インコーポレイテッド 絶縁体上に薄い単結晶シリコン島状部を製造する方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112938894B (zh) * 2021-03-11 2024-06-28 中北大学 一种多层次立体化的mems器件抗冲击防护结构的制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01503026A (ja) * 1987-01-27 1989-10-12 アドバンスト マイクロ デバイシス,インコーポレイテッド 絶縁体上に薄い単結晶シリコン島状部を製造する方法

Also Published As

Publication number Publication date
GB1480129A (en) 1977-07-20
IT1030218B (it) 1979-03-30
FR2262406B1 (en, 2012) 1982-02-19
DE2508091A1 (de) 1975-08-28
NL7502154A (nl) 1975-08-28
BE825855A (fr) 1975-08-25
FR2262406A1 (en, 2012) 1975-09-19

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