JPS50122988A - - Google Patents
Info
- Publication number
- JPS50122988A JPS50122988A JP50025549A JP2554975A JPS50122988A JP S50122988 A JPS50122988 A JP S50122988A JP 50025549 A JP50025549 A JP 50025549A JP 2554975 A JP2554975 A JP 2554975A JP S50122988 A JPS50122988 A JP S50122988A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US447339A US3916191A (en) | 1974-03-01 | 1974-03-01 | Imaging apparatus and method for use with ion scattering spectrometer |
| US447378A US3916190A (en) | 1974-03-01 | 1974-03-01 | Depth profile analysis apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50122988A true JPS50122988A (fr) | 1975-09-26 |
Family
ID=27034945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50025549A Pending JPS50122988A (fr) | 1974-03-01 | 1975-02-28 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS50122988A (fr) |
| DE (1) | DE2509327A1 (fr) |
| FR (1) | FR2262799B1 (fr) |
| GB (1) | GB1506175A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4107526A (en) * | 1976-03-22 | 1978-08-15 | Minnesota Mining And Manufacturing Company | Ion scattering spectrometer with modified bias |
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1975
- 1975-02-28 FR FR7506476A patent/FR2262799B1/fr not_active Expired
- 1975-02-28 DE DE19752509327 patent/DE2509327A1/de not_active Withdrawn
- 1975-02-28 GB GB850275A patent/GB1506175A/en not_active Expired
- 1975-02-28 JP JP50025549A patent/JPS50122988A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2262799A1 (fr) | 1975-09-26 |
| FR2262799B1 (fr) | 1978-10-06 |
| DE2509327A1 (de) | 1975-10-02 |
| GB1506175A (en) | 1978-04-05 |