GB1506175A - Imaging and depth profile analysis apparatus for use with ion scattering spectrometer - Google Patents
Imaging and depth profile analysis apparatus for use with ion scattering spectrometerInfo
- Publication number
- GB1506175A GB1506175A GB850275A GB850275A GB1506175A GB 1506175 A GB1506175 A GB 1506175A GB 850275 A GB850275 A GB 850275A GB 850275 A GB850275 A GB 850275A GB 1506175 A GB1506175 A GB 1506175A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ion
- sample
- energy
- analyser
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1506175 Television systems MINNESOTA MINING & MFG CO 28 Feb 1975 [1 March 1974 (2)] 8502/75 Heading H4F [Also in Division H1] In an arrangement for the surface analysis of a sample a beam of ions of known energy and mass is raster scanned over an area of the sample. Primary ions scattered from the sample and having a selected energy are detected and a corresponding signal is generated. In the arrangement illustrated in Fig. 1 the ion beam from ion generator 26 is deflected by potentials on x, y deflector electrodes 57, 114 to provide a raster scan of a sample carried by support 61. Support 61 may carry several samples selectively presentable to the beam. Instead of beam deflection the support may be moved in a raster movement. Ions scattered along a path perpendicular to the ion beam pass via energy analyser 45 to ion detector 70 to generate a corresponding electric signal. The brief pulses in this signal pass via pulse stretcher 136 to c.r.t. display unit 112, the raster scan of the display being controlled by signals from the generators providing the ion beam deflection potentials. The ion beam energy and the energy of the detected scattered ions are selected by adjustment of the voltages applied to the beam generator 26 and ion analyser 45. In another arrangement (Fig. 2, not shown), the signal from the ion detector 70 is passed to a pulse height analyser (142) which feeds an indicator (80). The analyser is enabled only during a part of each scan line to avoid response to the edge of the crater formed in the sample by sputtering. The enabling signal is generated by comparator circuitry (140) which receives the outputs of the ion beam deflection potential generators.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US447378A US3916190A (en) | 1974-03-01 | 1974-03-01 | Depth profile analysis apparatus |
US447339A US3916191A (en) | 1974-03-01 | 1974-03-01 | Imaging apparatus and method for use with ion scattering spectrometer |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1506175A true GB1506175A (en) | 1978-04-05 |
Family
ID=27034945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB850275A Expired GB1506175A (en) | 1974-03-01 | 1975-02-28 | Imaging and depth profile analysis apparatus for use with ion scattering spectrometer |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS50122988A (en) |
DE (1) | DE2509327A1 (en) |
FR (1) | FR2262799B1 (en) |
GB (1) | GB1506175A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4107526A (en) * | 1976-03-22 | 1978-08-15 | Minnesota Mining And Manufacturing Company | Ion scattering spectrometer with modified bias |
-
1975
- 1975-02-28 DE DE19752509327 patent/DE2509327A1/en not_active Withdrawn
- 1975-02-28 FR FR7506476A patent/FR2262799B1/fr not_active Expired
- 1975-02-28 GB GB850275A patent/GB1506175A/en not_active Expired
- 1975-02-28 JP JP50025549A patent/JPS50122988A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE2509327A1 (en) | 1975-10-02 |
FR2262799B1 (en) | 1978-10-06 |
FR2262799A1 (en) | 1975-09-26 |
JPS50122988A (en) | 1975-09-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |