FR2262799B1 - - Google Patents

Info

Publication number
FR2262799B1
FR2262799B1 FR7506476A FR7506476A FR2262799B1 FR 2262799 B1 FR2262799 B1 FR 2262799B1 FR 7506476 A FR7506476 A FR 7506476A FR 7506476 A FR7506476 A FR 7506476A FR 2262799 B1 FR2262799 B1 FR 2262799B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7506476A
Other versions
FR2262799A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US447339A external-priority patent/US3916191A/en
Priority claimed from US447378A external-priority patent/US3916190A/en
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of FR2262799A1 publication Critical patent/FR2262799A1/fr
Application granted granted Critical
Publication of FR2262799B1 publication Critical patent/FR2262799B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
FR7506476A 1974-03-01 1975-02-28 Expired FR2262799B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US447339A US3916191A (en) 1974-03-01 1974-03-01 Imaging apparatus and method for use with ion scattering spectrometer
US447378A US3916190A (en) 1974-03-01 1974-03-01 Depth profile analysis apparatus

Publications (2)

Publication Number Publication Date
FR2262799A1 FR2262799A1 (fr) 1975-09-26
FR2262799B1 true FR2262799B1 (fr) 1978-10-06

Family

ID=27034945

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7506476A Expired FR2262799B1 (fr) 1974-03-01 1975-02-28

Country Status (4)

Country Link
JP (1) JPS50122988A (fr)
DE (1) DE2509327A1 (fr)
FR (1) FR2262799B1 (fr)
GB (1) GB1506175A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias

Also Published As

Publication number Publication date
FR2262799A1 (fr) 1975-09-26
DE2509327A1 (de) 1975-10-02
GB1506175A (en) 1978-04-05
JPS50122988A (fr) 1975-09-26

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Legal Events

Date Code Title Description
ST Notification of lapse