JPS50110788A - - Google Patents
Info
- Publication number
- JPS50110788A JPS50110788A JP1548474A JP1548474A JPS50110788A JP S50110788 A JPS50110788 A JP S50110788A JP 1548474 A JP1548474 A JP 1548474A JP 1548474 A JP1548474 A JP 1548474A JP S50110788 A JPS50110788 A JP S50110788A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548474A JPS5724651B2 (ja) | 1974-02-08 | 1974-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548474A JPS5724651B2 (ja) | 1974-02-08 | 1974-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50110788A true JPS50110788A (ja) | 1975-09-01 |
| JPS5724651B2 JPS5724651B2 (ja) | 1982-05-25 |
Family
ID=11890058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1548474A Expired JPS5724651B2 (ja) | 1974-02-08 | 1974-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5724651B2 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5756922A (en) * | 1980-09-19 | 1982-04-05 | Sanyo Electric Co Ltd | Epitaxially growing method |
| JPS5980940A (ja) * | 1982-11-01 | 1984-05-10 | Oki Electric Ind Co Ltd | 絶縁物分離基板の製造方法 |
| JPS59104139A (ja) * | 1982-12-06 | 1984-06-15 | Nec Corp | 半導体集積回路装置 |
| JPS6163013A (ja) * | 1984-09-04 | 1986-04-01 | Agency Of Ind Science & Technol | Ｓｏｉ用シ−ド構造の製造方法 |
| JPS6194339A (ja) * | 1984-10-15 | 1986-05-13 | Rohm Co Ltd | 半導体装置のケガキ傷形成法 |
| JPH01185935A (ja) * | 1988-01-21 | 1989-07-25 | Toshiba Corp | 半導体装置の製造方法 |
-
1974
- 1974-02-08 JP JP1548474A patent/JPS5724651B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5756922A (en) * | 1980-09-19 | 1982-04-05 | Sanyo Electric Co Ltd | Epitaxially growing method |
| JPH0313736B2 (ja) * | 1980-09-19 | 1991-02-25 | Sanyo Electric Co | |
| JPS5980940A (ja) * | 1982-11-01 | 1984-05-10 | Oki Electric Ind Co Ltd | 絶縁物分離基板の製造方法 |
| JPS59104139A (ja) * | 1982-12-06 | 1984-06-15 | Nec Corp | 半導体集積回路装置 |
| JPS6163013A (ja) * | 1984-09-04 | 1986-04-01 | Agency Of Ind Science & Technol | Ｓｏｉ用シ−ド構造の製造方法 |
| JPS6194339A (ja) * | 1984-10-15 | 1986-05-13 | Rohm Co Ltd | 半導体装置のケガキ傷形成法 |
| JPH01185935A (ja) * | 1988-01-21 | 1989-07-25 | Toshiba Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5724651B2 (ja) | 1982-05-25 |