JPS4984587A - - Google Patents

Info

Publication number
JPS4984587A
JPS4984587A JP47127853A JP12785372A JPS4984587A JP S4984587 A JPS4984587 A JP S4984587A JP 47127853 A JP47127853 A JP 47127853A JP 12785372 A JP12785372 A JP 12785372A JP S4984587 A JPS4984587 A JP S4984587A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47127853A
Other languages
Japanese (ja)
Other versions
JPS5147592B2 (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47127853A priority Critical patent/JPS5147592B2/ja
Publication of JPS4984587A publication Critical patent/JPS4984587A/ja
Publication of JPS5147592B2 publication Critical patent/JPS5147592B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP47127853A 1972-12-19 1972-12-19 Expired JPS5147592B2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47127853A JPS5147592B2 (nl) 1972-12-19 1972-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47127853A JPS5147592B2 (nl) 1972-12-19 1972-12-19

Publications (2)

Publication Number Publication Date
JPS4984587A true JPS4984587A (nl) 1974-08-14
JPS5147592B2 JPS5147592B2 (nl) 1976-12-15

Family

ID=14970273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47127853A Expired JPS5147592B2 (nl) 1972-12-19 1972-12-19

Country Status (1)

Country Link
JP (1) JPS5147592B2 (nl)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122887A (nl) * 1974-03-13 1975-09-26
JPS50141980A (nl) * 1974-05-02 1975-11-15
JPS5168186A (en) * 1974-12-10 1976-06-12 Nippon Electric Co Handotaisochino seizohoho
JPS51118380A (en) * 1975-04-10 1976-10-18 Mitsubishi Electric Corp Manufacturing process for ic
JPS5886761A (ja) * 1981-10-27 1983-05-24 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン バイポ−ラトランジスタ・フリツプフロツプ用のポリシリコン相互接続
JPS5972165A (ja) * 1983-09-05 1984-04-24 Hitachi Ltd 半導体装置
JPS61190974A (ja) * 1985-11-22 1986-08-25 Nec Corp 相補型mis電界効果半導体装置
JPS61204962A (ja) * 1985-03-08 1986-09-11 Seiko Instr & Electronics Ltd Cmosの製造方法
JPH02156831A (ja) * 1988-12-12 1990-06-15 Freunt Ind Co Ltd 粉衣および単離方法および装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733855Y2 (nl) * 1979-11-12 1982-07-26

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122887A (nl) * 1974-03-13 1975-09-26
JPS50141980A (nl) * 1974-05-02 1975-11-15
JPS5168186A (en) * 1974-12-10 1976-06-12 Nippon Electric Co Handotaisochino seizohoho
JPS6011471B2 (ja) * 1974-12-10 1985-03-26 日本電気株式会社 半導体装置
JPS51118380A (en) * 1975-04-10 1976-10-18 Mitsubishi Electric Corp Manufacturing process for ic
JPS5886761A (ja) * 1981-10-27 1983-05-24 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン バイポ−ラトランジスタ・フリツプフロツプ用のポリシリコン相互接続
JPS5972165A (ja) * 1983-09-05 1984-04-24 Hitachi Ltd 半導体装置
JPH0520912B2 (nl) * 1983-09-05 1993-03-22 Hitachi Ltd
JPS61204962A (ja) * 1985-03-08 1986-09-11 Seiko Instr & Electronics Ltd Cmosの製造方法
JPH0369182B2 (nl) * 1985-03-08 1991-10-31 Seiko Instr & Electronics
JPS61190974A (ja) * 1985-11-22 1986-08-25 Nec Corp 相補型mis電界効果半導体装置
JPH02156831A (ja) * 1988-12-12 1990-06-15 Freunt Ind Co Ltd 粉衣および単離方法および装置

Also Published As

Publication number Publication date
JPS5147592B2 (nl) 1976-12-15

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