JPS4978640A - - Google Patents
Info
- Publication number
- JPS4978640A JPS4978640A JP12156172A JP12156172A JPS4978640A JP S4978640 A JPS4978640 A JP S4978640A JP 12156172 A JP12156172 A JP 12156172A JP 12156172 A JP12156172 A JP 12156172A JP S4978640 A JPS4978640 A JP S4978640A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156172A JPS4978640A (ja) | 1972-12-06 | 1972-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156172A JPS4978640A (ja) | 1972-12-06 | 1972-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4978640A true JPS4978640A (ja) | 1974-07-29 |
Family
ID=14814270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12156172A Pending JPS4978640A (ja) | 1972-12-06 | 1972-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4978640A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146584A (ja) * | 1974-10-18 | 1976-04-21 | Pioneer Electronic Corp | Jochakusochi |
| JPS5665974A (en) * | 1979-11-02 | 1981-06-04 | Komatsu Ltd | Vapor deposition controlling method |
| JPS6411970A (en) * | 1987-07-06 | 1989-01-17 | Nippon Telegraph & Telephone | Device for forming and evaluating multi-layered thin film |
| JPH0450604A (ja) * | 1990-06-13 | 1992-02-19 | General Signal Japan Kk | フォトレジスト溶解速度の測定方法 |
| JPH05248817A (ja) * | 1991-12-20 | 1993-09-28 | Internatl Business Mach Corp <Ibm> | 干渉計装置、半導体処理装置ならびに基板表面位置の測定方法 |
| JP2008051699A (ja) * | 2006-08-25 | 2008-03-06 | Showa Shinku:Kk | 有機薄膜の膜厚測定装置及び有機薄膜形成装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913157A (ja) * | 1972-06-07 | 1974-02-05 | ||
| JPS4931272A (ja) * | 1972-03-02 | 1974-03-20 |
-
1972
- 1972-12-06 JP JP12156172A patent/JPS4978640A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4931272A (ja) * | 1972-03-02 | 1974-03-20 | ||
| JPS4913157A (ja) * | 1972-06-07 | 1974-02-05 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146584A (ja) * | 1974-10-18 | 1976-04-21 | Pioneer Electronic Corp | Jochakusochi |
| JPS5665974A (en) * | 1979-11-02 | 1981-06-04 | Komatsu Ltd | Vapor deposition controlling method |
| JPS6411970A (en) * | 1987-07-06 | 1989-01-17 | Nippon Telegraph & Telephone | Device for forming and evaluating multi-layered thin film |
| JPH0450604A (ja) * | 1990-06-13 | 1992-02-19 | General Signal Japan Kk | フォトレジスト溶解速度の測定方法 |
| JPH05248817A (ja) * | 1991-12-20 | 1993-09-28 | Internatl Business Mach Corp <Ibm> | 干渉計装置、半導体処理装置ならびに基板表面位置の測定方法 |
| JP2008051699A (ja) * | 2006-08-25 | 2008-03-06 | Showa Shinku:Kk | 有機薄膜の膜厚測定装置及び有機薄膜形成装置 |