JPS4966188A - - Google Patents

Info

Publication number
JPS4966188A
JPS4966188A JP47106647A JP10664772A JPS4966188A JP S4966188 A JPS4966188 A JP S4966188A JP 47106647 A JP47106647 A JP 47106647A JP 10664772 A JP10664772 A JP 10664772A JP S4966188 A JPS4966188 A JP S4966188A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47106647A
Other languages
Japanese (ja)
Other versions
JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47106647A priority Critical patent/JPS5225276B2/ja
Publication of JPS4966188A publication Critical patent/JPS4966188A/ja
Publication of JPS5225276B2 publication Critical patent/JPS5225276B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47106647A 1972-10-26 1972-10-26 Expired JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Publications (2)

Publication Number Publication Date
JPS4966188A true JPS4966188A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-26
JPS5225276B2 JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-06

Family

ID=14438895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47106647A Expired JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Country Status (1)

Country Link
JP (1) JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119446A (ja) * 1985-11-20 1987-05-30 Ratotsuku Syst Eng Kk 結晶欠陥検査方法及びその検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119446A (ja) * 1985-11-20 1987-05-30 Ratotsuku Syst Eng Kk 結晶欠陥検査方法及びその検査装置

Also Published As

Publication number Publication date
JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-06

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