JPS5225276B2 - - Google Patents

Info

Publication number
JPS5225276B2
JPS5225276B2 JP47106647A JP10664772A JPS5225276B2 JP S5225276 B2 JPS5225276 B2 JP S5225276B2 JP 47106647 A JP47106647 A JP 47106647A JP 10664772 A JP10664772 A JP 10664772A JP S5225276 B2 JPS5225276 B2 JP S5225276B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47106647A
Other languages
Japanese (ja)
Other versions
JPS4966188A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47106647A priority Critical patent/JPS5225276B2/ja
Publication of JPS4966188A publication Critical patent/JPS4966188A/ja
Publication of JPS5225276B2 publication Critical patent/JPS5225276B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47106647A 1972-10-26 1972-10-26 Expired JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Publications (2)

Publication Number Publication Date
JPS4966188A JPS4966188A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-26
JPS5225276B2 true JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-06

Family

ID=14438895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47106647A Expired JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-26 1972-10-26

Country Status (1)

Country Link
JP (1) JPS5225276B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2545209B2 (ja) * 1985-11-20 1996-10-16 ラトック・システム・エンジニアリング 株式会社 結晶欠陥検査方法及びその検査装置

Also Published As

Publication number Publication date
JPS4966188A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-26

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