JPS4962385A - - Google Patents

Info

Publication number
JPS4962385A
JPS4962385A JP10440272A JP10440272A JPS4962385A JP S4962385 A JPS4962385 A JP S4962385A JP 10440272 A JP10440272 A JP 10440272A JP 10440272 A JP10440272 A JP 10440272A JP S4962385 A JPS4962385 A JP S4962385A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10440272A
Other languages
Japanese (ja)
Other versions
JPS5224514B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10440272A priority Critical patent/JPS5224514B2/ja
Priority to US408822A priority patent/US3897325A/en
Publication of JPS4962385A publication Critical patent/JPS4962385A/ja
Publication of JPS5224514B2 publication Critical patent/JPS5224514B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10440272A 1972-10-20 1972-10-20 Expired JPS5224514B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20
US408822A US3897325A (en) 1972-10-20 1973-10-23 Low temperature sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Publications (2)

Publication Number Publication Date
JPS4962385A true JPS4962385A (enrdf_load_stackoverflow) 1974-06-17
JPS5224514B2 JPS5224514B2 (enrdf_load_stackoverflow) 1977-07-01

Family

ID=14379711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10440272A Expired JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Country Status (1)

Country Link
JP (1) JPS5224514B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (ja) * 1974-08-05 1976-02-12 Toray Industries Renzokusupatsutaringuhoho
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device
JPH0198162U (enrdf_load_stackoverflow) * 1987-12-17 1989-06-30

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8001557A (nl) * 1980-03-17 1981-10-16 Philips Nv Gelijkstroom-wisselstroom omzetter.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (ja) * 1974-08-05 1976-02-12 Toray Industries Renzokusupatsutaringuhoho
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device
JPH0198162U (enrdf_load_stackoverflow) * 1987-12-17 1989-06-30

Also Published As

Publication number Publication date
JPS5224514B2 (enrdf_load_stackoverflow) 1977-07-01

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