JPS5224514B2 - - Google Patents

Info

Publication number
JPS5224514B2
JPS5224514B2 JP10440272A JP10440272A JPS5224514B2 JP S5224514 B2 JPS5224514 B2 JP S5224514B2 JP 10440272 A JP10440272 A JP 10440272A JP 10440272 A JP10440272 A JP 10440272A JP S5224514 B2 JPS5224514 B2 JP S5224514B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10440272A
Other languages
Japanese (ja)
Other versions
JPS4962385A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10440272A priority Critical patent/JPS5224514B2/ja
Priority to US408822A priority patent/US3897325A/en
Publication of JPS4962385A publication Critical patent/JPS4962385A/ja
Publication of JPS5224514B2 publication Critical patent/JPS5224514B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10440272A 1972-10-20 1972-10-20 Expired JPS5224514B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20
US408822A US3897325A (en) 1972-10-20 1973-10-23 Low temperature sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Publications (2)

Publication Number Publication Date
JPS4962385A JPS4962385A (enrdf_load_stackoverflow) 1974-06-17
JPS5224514B2 true JPS5224514B2 (enrdf_load_stackoverflow) 1977-07-01

Family

ID=14379711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10440272A Expired JPS5224514B2 (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Country Status (1)

Country Link
JP (1) JPS5224514B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141783A (en) * 1980-03-17 1981-11-05 Philips Nv Dc-ac converter

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (ja) * 1974-08-05 1976-02-12 Toray Industries Renzokusupatsutaringuhoho
JPS5931977B2 (ja) * 1977-01-24 1984-08-06 株式会社日立製作所 プラズマｃｖｄ装置
JPH0198162U (enrdf_load_stackoverflow) * 1987-12-17 1989-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141783A (en) * 1980-03-17 1981-11-05 Philips Nv Dc-ac converter

Also Published As

Publication number Publication date
JPS4962385A (enrdf_load_stackoverflow) 1974-06-17

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