JPS4960683A - - Google Patents

Info

Publication number
JPS4960683A
JPS4960683A JP10188972A JP10188972A JPS4960683A JP S4960683 A JPS4960683 A JP S4960683A JP 10188972 A JP10188972 A JP 10188972A JP 10188972 A JP10188972 A JP 10188972A JP S4960683 A JPS4960683 A JP S4960683A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10188972A
Other languages
Japanese (ja)
Other versions
JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10188972A priority Critical patent/JPS5336759B2/ja
Publication of JPS4960683A publication Critical patent/JPS4960683A/ja
Publication of JPS5336759B2 publication Critical patent/JPS5336759B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP10188972A 1972-10-13 1972-10-13 Expired JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10188972A JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-13 1972-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10188972A JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-13 1972-10-13

Publications (2)

Publication Number Publication Date
JPS4960683A true JPS4960683A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-12
JPS5336759B2 JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-04

Family

ID=14312485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10188972A Expired JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-13 1972-10-13

Country Status (1)

Country Link
JP (1) JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144270A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Projection-type mask aligner
JPS54101676A (en) * 1978-01-16 1979-08-10 Rca Corp Method of and device for aligning photo mask
JPS5743232A (en) * 1980-07-02 1982-03-11 Yokogawa Hewlett Packard Ltd Data compression device
JPS6029834A (ja) * 1983-07-06 1985-02-15 Fuji Electric Co Ltd デ−タ処理方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145336U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-12-28 1982-09-13
JPS60161944U (ja) * 1985-02-04 1985-10-28 タイガー魔法瓶株式会社 ポンプ注液式液体容器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144270A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Projection-type mask aligner
JPS54101676A (en) * 1978-01-16 1979-08-10 Rca Corp Method of and device for aligning photo mask
JPS5743232A (en) * 1980-07-02 1982-03-11 Yokogawa Hewlett Packard Ltd Data compression device
JPS6029834A (ja) * 1983-07-06 1985-02-15 Fuji Electric Co Ltd デ−タ処理方法

Also Published As

Publication number Publication date
JPS5336759B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-04

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