JPS4960175A - - Google Patents
Info
- Publication number
- JPS4960175A JPS4960175A JP8261273A JP8261273A JPS4960175A JP S4960175 A JPS4960175 A JP S4960175A JP 8261273 A JP8261273 A JP 8261273A JP 8261273 A JP8261273 A JP 8261273A JP S4960175 A JPS4960175 A JP S4960175A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722235342 DE2235342A1 (de) | 1972-07-19 | 1972-07-19 | Diffusionsrohr zur dotierung von halbleiterscheiben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4960175A true JPS4960175A (hu) | 1974-06-11 |
Family
ID=5851027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8261273A Pending JPS4960175A (hu) | 1972-07-19 | 1973-07-19 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4960175A (hu) |
| DE (1) | DE2235342A1 (hu) |
| FR (1) | FR2192872A1 (hu) |
| GB (1) | GB1379872A (hu) |
| IT (1) | IT991242B (hu) |
| NL (1) | NL7304675A (hu) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1502754A (en) * | 1975-12-22 | 1978-03-01 | Siemens Ag | Heat-treatment of semi-conductor wafers |
| CN102797040B (zh) * | 2012-08-22 | 2015-08-12 | 中国科学院电工研究所 | 一种硼(b)扩散掺杂的方法 |
-
1972
- 1972-07-19 DE DE19722235342 patent/DE2235342A1/de active Pending
-
1973
- 1973-02-19 GB GB796673A patent/GB1379872A/en not_active Expired
- 1973-04-04 NL NL7304675A patent/NL7304675A/xx unknown
- 1973-07-13 FR FR7325824A patent/FR2192872A1/fr not_active Withdrawn
- 1973-07-18 IT IT2670473A patent/IT991242B/it active
- 1973-07-19 JP JP8261273A patent/JPS4960175A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL7304675A (hu) | 1974-01-22 |
| DE2235342A1 (de) | 1974-01-31 |
| FR2192872A1 (hu) | 1974-02-15 |
| IT991242B (it) | 1975-07-30 |
| GB1379872A (en) | 1975-01-08 |