IT991242B - Tubo di diffusione per il drogaggio di dischi di materiale semicondut tore - Google Patents

Tubo di diffusione per il drogaggio di dischi di materiale semicondut tore

Info

Publication number
IT991242B
IT991242B IT2670473A IT2670473A IT991242B IT 991242 B IT991242 B IT 991242B IT 2670473 A IT2670473 A IT 2670473A IT 2670473 A IT2670473 A IT 2670473A IT 991242 B IT991242 B IT 991242B
Authority
IT
Italy
Prior art keywords
draining
discs
semiconductive material
diffusion tube
diffusion
Prior art date
Application number
IT2670473A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT991242B publication Critical patent/IT991242B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT2670473A 1972-07-19 1973-07-18 Tubo di diffusione per il drogaggio di dischi di materiale semicondut tore IT991242B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722235342 DE2235342A1 (de) 1972-07-19 1972-07-19 Diffusionsrohr zur dotierung von halbleiterscheiben

Publications (1)

Publication Number Publication Date
IT991242B true IT991242B (it) 1975-07-30

Family

ID=5851027

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2670473A IT991242B (it) 1972-07-19 1973-07-18 Tubo di diffusione per il drogaggio di dischi di materiale semicondut tore

Country Status (6)

Country Link
JP (1) JPS4960175A (hu)
DE (1) DE2235342A1 (hu)
FR (1) FR2192872A1 (hu)
GB (1) GB1379872A (hu)
IT (1) IT991242B (hu)
NL (1) NL7304675A (hu)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
CN102797040B (zh) * 2012-08-22 2015-08-12 中国科学院电工研究所 一种硼(b)扩散掺杂的方法

Also Published As

Publication number Publication date
NL7304675A (hu) 1974-01-22
GB1379872A (en) 1975-01-08
JPS4960175A (hu) 1974-06-11
DE2235342A1 (de) 1974-01-31
FR2192872A1 (hu) 1974-02-15

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