JPS4958754A - - Google Patents
Info
- Publication number
- JPS4958754A JPS4958754A JP48069254A JP6925473A JPS4958754A JP S4958754 A JPS4958754 A JP S4958754A JP 48069254 A JP48069254 A JP 48069254A JP 6925473 A JP6925473 A JP 6925473A JP S4958754 A JPS4958754 A JP S4958754A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- H10P95/00—
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2900272A GB1436999A (en) | 1972-06-21 | 1972-06-21 | Method of depositing aluminium on the surface of a semi- conductor wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4958754A true JPS4958754A (OSRAM) | 1974-06-07 |
Family
ID=10284692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48069254A Pending JPS4958754A (OSRAM) | 1972-06-21 | 1973-06-21 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4958754A (OSRAM) |
| AU (1) | AU467587B2 (OSRAM) |
| DE (1) | DE2331717A1 (OSRAM) |
| GB (1) | GB1436999A (OSRAM) |
| NL (1) | NL7308687A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168635A (ja) * | 1983-03-15 | 1984-09-22 | Fuji Electric Corp Res & Dev Ltd | 半導体装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948952B2 (ja) * | 1981-03-23 | 1984-11-29 | 富士通株式会社 | 金属薄膜の形成方法 |
| DE4215664C1 (de) * | 1992-05-13 | 1993-11-25 | Mtu Muenchen Gmbh | Verfahren zum Aufbringen von metallischen Zwischenschichten und seine Anwendung |
-
1972
- 1972-06-21 GB GB2900272A patent/GB1436999A/en not_active Expired
-
1973
- 1973-06-12 AU AU56844/73A patent/AU467587B2/en not_active Expired
- 1973-06-21 NL NL7308687A patent/NL7308687A/xx unknown
- 1973-06-21 JP JP48069254A patent/JPS4958754A/ja active Pending
- 1973-06-22 DE DE2331717A patent/DE2331717A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168635A (ja) * | 1983-03-15 | 1984-09-22 | Fuji Electric Corp Res & Dev Ltd | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU5684473A (en) | 1974-12-12 |
| NL7308687A (OSRAM) | 1973-12-27 |
| AU467587B2 (en) | 1975-12-04 |
| DE2331717A1 (de) | 1974-01-10 |
| GB1436999A (en) | 1976-05-26 |