JPS4955574A - - Google Patents
Info
- Publication number
- JPS4955574A JPS4955574A JP9903072A JP9903072A JPS4955574A JP S4955574 A JPS4955574 A JP S4955574A JP 9903072 A JP9903072 A JP 9903072A JP 9903072 A JP9903072 A JP 9903072A JP S4955574 A JPS4955574 A JP S4955574A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903072A JPS5517102B2 (ja) | 1972-10-04 | 1972-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903072A JPS5517102B2 (ja) | 1972-10-04 | 1972-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4955574A true JPS4955574A (ja) | 1974-05-29 |
| JPS5517102B2 JPS5517102B2 (ja) | 1980-05-09 |
Family
ID=14235916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9903072A Expired JPS5517102B2 (ja) | 1972-10-04 | 1972-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5517102B2 (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5072462A (ja) * | 1973-10-30 | 1975-06-16 | ||
| JPS5895818A (ja) * | 1981-12-02 | 1983-06-07 | Ushio Inc | 被膜形成方法 |
| JPS5939928U (ja) * | 1982-09-07 | 1984-03-14 | 東芝機械株式会社 | 化学気相成長装置 |
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |
| JPH0349250A (ja) * | 1989-07-17 | 1991-03-04 | Hitachi Ltd | 試料搬送容器および試料移送装置 |
-
1972
- 1972-10-04 JP JP9903072A patent/JPS5517102B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5072462A (ja) * | 1973-10-30 | 1975-06-16 | ||
| JPS5895818A (ja) * | 1981-12-02 | 1983-06-07 | Ushio Inc | 被膜形成方法 |
| JPS5939928U (ja) * | 1982-09-07 | 1984-03-14 | 東芝機械株式会社 | 化学気相成長装置 |
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |
| JPH0349250A (ja) * | 1989-07-17 | 1991-03-04 | Hitachi Ltd | 試料搬送容器および試料移送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5517102B2 (ja) | 1980-05-09 |