JPS4952579A - - Google Patents
Info
- Publication number
- JPS4952579A JPS4952579A JP9498872A JP9498872A JPS4952579A JP S4952579 A JPS4952579 A JP S4952579A JP 9498872 A JP9498872 A JP 9498872A JP 9498872 A JP9498872 A JP 9498872A JP S4952579 A JPS4952579 A JP S4952579A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9498872A JPS5529579B2 (ja) | 1972-09-21 | 1972-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9498872A JPS5529579B2 (ja) | 1972-09-21 | 1972-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4952579A true JPS4952579A (ja) | 1974-05-22 |
| JPS5529579B2 JPS5529579B2 (ja) | 1980-08-05 |
Family
ID=14125253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9498872A Expired JPS5529579B2 (ja) | 1972-09-21 | 1972-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5529579B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60223130A (ja) * | 1984-04-19 | 1985-11-07 | Sharp Corp | 基板の洗滌乾燥方法及びその装置 |
| JPH02110993A (ja) * | 1988-10-20 | 1990-04-24 | Fujitsu Ltd | プリント配線板の洗浄装置 |
| JPH09283488A (ja) * | 1996-04-12 | 1997-10-31 | Lg Semicon Co Ltd | 半導体ウェハ洗浄装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI413649B (zh) | 2006-04-12 | 2013-11-01 | Kuraray Co | 分散穩定劑 |
-
1972
- 1972-09-21 JP JP9498872A patent/JPS5529579B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60223130A (ja) * | 1984-04-19 | 1985-11-07 | Sharp Corp | 基板の洗滌乾燥方法及びその装置 |
| JPH0458686B2 (ja) * | 1984-04-19 | 1992-09-18 | Shaapu Kk | |
| JPH02110993A (ja) * | 1988-10-20 | 1990-04-24 | Fujitsu Ltd | プリント配線板の洗浄装置 |
| JPH09283488A (ja) * | 1996-04-12 | 1997-10-31 | Lg Semicon Co Ltd | 半導体ウェハ洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5529579B2 (ja) | 1980-08-05 |