JPS4942352A - - Google Patents

Info

Publication number
JPS4942352A
JPS4942352A JP4629473A JP4629473A JPS4942352A JP S4942352 A JPS4942352 A JP S4942352A JP 4629473 A JP4629473 A JP 4629473A JP 4629473 A JP4629473 A JP 4629473A JP S4942352 A JPS4942352 A JP S4942352A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4629473A
Other languages
Japanese (ja)
Other versions
JPS512375B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4942352A publication Critical patent/JPS4942352A/ja
Publication of JPS512375B2 publication Critical patent/JPS512375B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Electrophotography Using Other Than Carlson'S Method (AREA)
  • Electron Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Paints Or Removers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP4629473A 1972-05-01 1973-04-25 Expired JPS512375B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24930872A 1972-05-01 1972-05-01

Publications (2)

Publication Number Publication Date
JPS4942352A true JPS4942352A (enrdf_load_stackoverflow) 1974-04-20
JPS512375B2 JPS512375B2 (enrdf_load_stackoverflow) 1976-01-26

Family

ID=22942915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4629473A Expired JPS512375B2 (enrdf_load_stackoverflow) 1972-05-01 1973-04-25

Country Status (8)

Country Link
JP (1) JPS512375B2 (enrdf_load_stackoverflow)
BE (1) BE798860A (enrdf_load_stackoverflow)
DE (1) DE2321684C3 (enrdf_load_stackoverflow)
FR (1) FR2183020B1 (enrdf_load_stackoverflow)
GB (1) GB1403834A (enrdf_load_stackoverflow)
IT (1) IT980926B (enrdf_load_stackoverflow)
NL (1) NL154015B (enrdf_load_stackoverflow)
SE (1) SE391405B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979525A (enrdf_load_stackoverflow) * 1972-11-13 1974-08-01
JPS59222928A (ja) * 1983-06-02 1984-12-14 Matsushita Electronics Corp マスク製作方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893127A (en) * 1973-09-27 1975-07-01 Rca Corp Electron beam recording media
US4289845A (en) * 1978-05-22 1981-09-15 Bell Telephone Laboratories, Inc. Fabrication based on radiation sensitive resists and related products

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979525A (enrdf_load_stackoverflow) * 1972-11-13 1974-08-01
JPS59222928A (ja) * 1983-06-02 1984-12-14 Matsushita Electronics Corp マスク製作方法

Also Published As

Publication number Publication date
FR2183020B1 (enrdf_load_stackoverflow) 1976-11-12
IT980926B (it) 1974-10-10
NL154015B (nl) 1977-07-15
FR2183020A1 (enrdf_load_stackoverflow) 1973-12-14
SE391405B (sv) 1977-02-14
DE2321684B1 (de) 1974-01-31
JPS512375B2 (enrdf_load_stackoverflow) 1976-01-26
DE2321684C3 (de) 1979-07-26
NL7305933A (enrdf_load_stackoverflow) 1973-11-05
BE798860A (fr) 1973-08-16
GB1403834A (en) 1975-08-28
DE2321684A1 (de) 1973-11-15

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