JPS4932827A - - Google Patents

Info

Publication number
JPS4932827A
JPS4932827A JP7455172A JP7455172A JPS4932827A JP S4932827 A JPS4932827 A JP S4932827A JP 7455172 A JP7455172 A JP 7455172A JP 7455172 A JP7455172 A JP 7455172A JP S4932827 A JPS4932827 A JP S4932827A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7455172A
Other languages
Japanese (ja)
Other versions
JPS533733B2 (bg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7455172A priority Critical patent/JPS533733B2/ja
Publication of JPS4932827A publication Critical patent/JPS4932827A/ja
Publication of JPS533733B2 publication Critical patent/JPS533733B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7455172A 1972-07-27 1972-07-27 Expired JPS533733B2 (bg)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (bg) 1972-07-27 1972-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (bg) 1972-07-27 1972-07-27

Publications (2)

Publication Number Publication Date
JPS4932827A true JPS4932827A (bg) 1974-03-26
JPS533733B2 JPS533733B2 (bg) 1978-02-09

Family

ID=13550480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7455172A Expired JPS533733B2 (bg) 1972-07-27 1972-07-27

Country Status (1)

Country Link
JP (1) JPS533733B2 (bg)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468074U (bg) * 1977-10-24 1979-05-15
JPS612210Y2 (bg) * 1981-01-09 1986-01-24
JP6681980B2 (ja) 2017-04-28 2020-04-15 三菱電機株式会社 冷凍サイクル装置及びこの冷凍サイクル装置を備えた電気機器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPS5810988B2 (ja) * 1975-05-23 1983-02-28 株式会社日立製作所 キソウカガクハンノウホウシキ
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Also Published As

Publication number Publication date
JPS533733B2 (bg) 1978-02-09

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