JPS4929779A - - Google Patents

Info

Publication number
JPS4929779A
JPS4929779A JP47071242A JP7124272A JPS4929779A JP S4929779 A JPS4929779 A JP S4929779A JP 47071242 A JP47071242 A JP 47071242A JP 7124272 A JP7124272 A JP 7124272A JP S4929779 A JPS4929779 A JP S4929779A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47071242A
Other languages
Japanese (ja)
Other versions
JPS5531616B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7124272A priority Critical patent/JPS5531616B2/ja
Publication of JPS4929779A publication Critical patent/JPS4929779A/ja
Publication of JPS5531616B2 publication Critical patent/JPS5531616B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP7124272A 1972-07-18 1972-07-18 Expired JPS5531616B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7124272A JPS5531616B2 (en:Method) 1972-07-18 1972-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7124272A JPS5531616B2 (en:Method) 1972-07-18 1972-07-18

Publications (2)

Publication Number Publication Date
JPS4929779A true JPS4929779A (en:Method) 1974-03-16
JPS5531616B2 JPS5531616B2 (en:Method) 1980-08-19

Family

ID=13455022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7124272A Expired JPS5531616B2 (en:Method) 1972-07-18 1972-07-18

Country Status (1)

Country Link
JP (1) JPS5531616B2 (en:Method)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940687A (en:Method) * 1972-08-23 1974-04-16
JPS55153345A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Manufacture of semiconductor device
JPS55165650A (en) * 1979-06-12 1980-12-24 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
JPS59154039A (ja) * 1983-02-22 1984-09-03 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPS59155944A (ja) * 1983-02-25 1984-09-05 Mitsubishi Electric Corp 半導体装置の製造方法
JPS61269308A (ja) * 1985-05-24 1986-11-28 Fujitsu Ltd 半導体装置の製造方法
JPS62169349A (ja) * 1987-01-14 1987-07-25 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPS6329970A (ja) * 1986-07-23 1988-02-08 新技術事業団 撮像素子アレイ及びその製作方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3381182A (en) * 1964-10-19 1968-04-30 Philco Ford Corp Microcircuits having buried conductive layers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3381182A (en) * 1964-10-19 1968-04-30 Philco Ford Corp Microcircuits having buried conductive layers

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940687A (en:Method) * 1972-08-23 1974-04-16
JPS55153345A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Manufacture of semiconductor device
JPS55165650A (en) * 1979-06-12 1980-12-24 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
JPS59154039A (ja) * 1983-02-22 1984-09-03 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPS59155944A (ja) * 1983-02-25 1984-09-05 Mitsubishi Electric Corp 半導体装置の製造方法
JPS61269308A (ja) * 1985-05-24 1986-11-28 Fujitsu Ltd 半導体装置の製造方法
JPS6329970A (ja) * 1986-07-23 1988-02-08 新技術事業団 撮像素子アレイ及びその製作方法
JPS62169349A (ja) * 1987-01-14 1987-07-25 Oki Electric Ind Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5531616B2 (en:Method) 1980-08-19

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