JPS4929766A - - Google Patents
Info
- Publication number
- JPS4929766A JPS4929766A JP7148972A JP7148972A JPS4929766A JP S4929766 A JPS4929766 A JP S4929766A JP 7148972 A JP7148972 A JP 7148972A JP 7148972 A JP7148972 A JP 7148972A JP S4929766 A JPS4929766 A JP S4929766A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
Landscapes
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7148972A JPS557656B2 (ko) | 1972-07-17 | 1972-07-17 | |
US377932A US3887839A (en) | 1972-07-17 | 1973-07-10 | Pulsed field emission type electron gun |
GB3291873A GB1431069A (en) | 1972-07-17 | 1973-07-10 | Pulsed field emission electron gun apparatus |
DE19732336155 DE2336155C3 (de) | 1972-07-17 | 1973-07-16 | Verfahren zum Betrieb einer FeIdemmissioiiselektronenquelle |
FR7326053A FR2193248B1 (ko) | 1972-07-17 | 1973-07-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7148972A JPS557656B2 (ko) | 1972-07-17 | 1972-07-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4929766A true JPS4929766A (ko) | 1974-03-16 |
JPS557656B2 JPS557656B2 (ko) | 1980-02-27 |
Family
ID=13462110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7148972A Expired JPS557656B2 (ko) | 1972-07-17 | 1972-07-17 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3887839A (ko) |
JP (1) | JPS557656B2 (ko) |
FR (1) | FR2193248B1 (ko) |
GB (1) | GB1431069A (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4337422A (en) * | 1980-03-17 | 1982-06-29 | The Perkin-Elmer Corporation | Field emission gun with noise compensation |
JPS5818101A (ja) * | 1981-07-27 | 1983-02-02 | Nippon Denzai Kogyo Kenkyusho:Kk | タツチセンサ− |
US5025196A (en) * | 1986-06-02 | 1991-06-18 | Canon Kabushiki Kaisha | Image forming device with beam current control |
JPS6440219A (en) * | 1987-08-04 | 1989-02-10 | Fanuc Ltd | Machining start hole measuring device |
JP3131339B2 (ja) * | 1993-12-22 | 2001-01-31 | 三菱電機株式会社 | 陰極、陰極線管および陰極線管の作動方法 |
JPH08212952A (ja) * | 1995-02-06 | 1996-08-20 | Natl Res Inst For Metals | レーザー照射型電子銃 |
EP1426997A1 (en) * | 2002-12-06 | 2004-06-09 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh | Field emitter beam source and method for controlling a beam current |
EP1760761B1 (en) * | 2005-09-05 | 2017-10-18 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam emitting device and method for operating a charged particle beam emitting device |
EP2365511B1 (en) | 2010-03-10 | 2013-05-08 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Feedback loop for emitter flash cleaning |
US8487534B2 (en) * | 2010-03-31 | 2013-07-16 | General Electric Company | Pierce gun and method of controlling thereof |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE878685C (de) * | 1951-03-28 | 1953-06-05 | Wilhelm Dipl-Chem Dr Stuermer | Verfahren zur Abbildung von Objekten mit dem Feldemissionsmikroskop |
US3361928A (en) * | 1962-11-28 | 1968-01-02 | Hitachi Ltd | Transformers having a plurality of secondary windings and charged particle sources of double pulsing system utilizing such transformers |
US3775637A (en) * | 1971-09-15 | 1973-11-27 | Rca Corp | Cathode ray display intensity control circuit |
US3786305A (en) * | 1972-05-15 | 1974-01-15 | Hitachi Ltd | Field emission electron gun |
US3794878A (en) * | 1972-12-11 | 1974-02-26 | Ford Motor Co | Electron beam regulator |
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1972
- 1972-07-17 JP JP7148972A patent/JPS557656B2/ja not_active Expired
-
1973
- 1973-07-10 US US377932A patent/US3887839A/en not_active Expired - Lifetime
- 1973-07-10 GB GB3291873A patent/GB1431069A/en not_active Expired
- 1973-07-16 FR FR7326053A patent/FR2193248B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2336155B2 (de) | 1975-10-16 |
FR2193248A1 (ko) | 1974-02-15 |
JPS557656B2 (ko) | 1980-02-27 |
GB1431069A (en) | 1976-04-07 |
US3887839A (en) | 1975-06-03 |
DE2336155A1 (de) | 1974-02-07 |
FR2193248B1 (ko) | 1977-02-18 |