JPS4926706A - - Google Patents
Info
- Publication number
- JPS4926706A JPS4926706A JP47067264A JP6726472A JPS4926706A JP S4926706 A JPS4926706 A JP S4926706A JP 47067264 A JP47067264 A JP 47067264A JP 6726472 A JP6726472 A JP 6726472A JP S4926706 A JPS4926706 A JP S4926706A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Linear Motors (AREA)
- Control Of Stepping Motors (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6726472A JPS5439562B2 (https=) | 1972-07-05 | 1972-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6726472A JPS5439562B2 (https=) | 1972-07-05 | 1972-07-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4926706A true JPS4926706A (https=) | 1974-03-09 |
| JPS5439562B2 JPS5439562B2 (https=) | 1979-11-28 |
Family
ID=13339910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6726472A Expired JPS5439562B2 (https=) | 1972-07-05 | 1972-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5439562B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999004481A1 (en) * | 1997-07-18 | 1999-01-28 | Nikon Corporation | Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device |
| JP2021126002A (ja) * | 2020-02-07 | 2021-08-30 | キヤノン株式会社 | 搬送装置および物品の製造方法 |
-
1972
- 1972-07-05 JP JP6726472A patent/JPS5439562B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999004481A1 (en) * | 1997-07-18 | 1999-01-28 | Nikon Corporation | Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device |
| JP2021126002A (ja) * | 2020-02-07 | 2021-08-30 | キヤノン株式会社 | 搬送装置および物品の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5439562B2 (https=) | 1979-11-28 |