JPS5439562B2 - - Google Patents
Info
- Publication number
- JPS5439562B2 JPS5439562B2 JP6726472A JP6726472A JPS5439562B2 JP S5439562 B2 JPS5439562 B2 JP S5439562B2 JP 6726472 A JP6726472 A JP 6726472A JP 6726472 A JP6726472 A JP 6726472A JP S5439562 B2 JPS5439562 B2 JP S5439562B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6726472A JPS5439562B2 (ja) | 1972-07-05 | 1972-07-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6726472A JPS5439562B2 (ja) | 1972-07-05 | 1972-07-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4926706A JPS4926706A (ja) | 1974-03-09 |
JPS5439562B2 true JPS5439562B2 (ja) | 1979-11-28 |
Family
ID=13339910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6726472A Expired JPS5439562B2 (ja) | 1972-07-05 | 1972-07-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5439562B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU8037098A (en) * | 1997-07-18 | 1999-02-10 | Nikon Corporation | Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device |
-
1972
- 1972-07-05 JP JP6726472A patent/JPS5439562B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4926706A (ja) | 1974-03-09 |